Technical Data PylonMet 1V - Leybold Optics GmbH

High flexibility with excellent
coating results
The PylonMet 1V fulfills the need for process
flexibility combined with high throughput.
High rate Magnetron sputtering processes as
well as various PECVD processes can be
performed by this flexible batch type system.
The two Magnetron sputter cathodes can be
protected individual by vacuum tight shutters
while PECVD is in process.
3D-COATING
Technical Features PylonMet 1V

Technical Features
Pylon dimensions
Useable length 1,070 mm / 42“
Diameter (effective) 620 mm / 24“
Max. coated area approx. 2 sqm / 21 sq ft
Max. load / pylon 40 – 50 kg / 88 – 110 lb.
Coating technology - High rate Magnetron sputtering with IPT
(Inter-Pole-Target) cathodes, with individual shutters.
- MF (40 KHz) PECVD
(Plasma-Enhanced-Chemical-Vapour-Deposition)
Sputtering materials Aluminium
Chromium
Stainless steel
Sn
Cu and many others
Productivity
Cycle time approx. 3-10 minutes (depending on layer stack
substrate material, substrate geometry and
environmental conditions)
Electrical power (approx.)
Max. connected load 200 / 275 kVA (one/two cathodes)
Typical consumption 85 kVA
reserved
alterations
LEYBOLD OPTICS GmbH
Siemensstrasse 88
63755 Alzenau, Germany
Phone: +49 6023 500 - 0
Fax: +49 6023 500 - 150
e-mail: info@leyboldoptics.com
www.leyboldoptics.com 25.07.2007/marketingservices/Technical