Miniature XYZ positioner MX 25 PDF - Optophase
Miniature XYZ positioner MX 25 PDF - Optophase
Miniature XYZ positioner MX 25 PDF - Optophase
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Micro<strong>positioner</strong>s<br />
Series <strong>MX</strong><br />
<strong>MX</strong> <strong>25</strong> with 2 mm travel in xyz-direction<br />
Positionsensors Motor Controllers Customized Items Index<br />
<strong>MX</strong> <strong>25</strong>/35 <strong>Miniature</strong> <strong>XYZ</strong> Positioners<br />
with piezo electric inertial drive<br />
Specifications<br />
Piezo driven step motor with low hysteresis<br />
holds position without power<br />
up to 10 mm travel in xyz<br />
step width about 10 nm (depends on controller)<br />
positioning accuracy better than 50 nm<br />
velocity up to 1.2 mm/s (depends on controller)<br />
CNC-machined aluminium body<br />
no limit switches necessary<br />
vacuum preparation optionally<br />
customized designs possible<br />
driven by hand-held (CN.030.0001)<br />
or USB controller (CU.030.0003)<br />
or USB controller (CF.030.xx0x)<br />
Application Examples<br />
Micro-/Nano Technology<br />
Bio Technology<br />
Microscopy<br />
Quality Control<br />
Metrology<br />
R & D<br />
Technical Data<br />
Travel:<br />
<strong>MX</strong> <strong>25</strong> 2 mm in xyz<br />
<strong>MX</strong> 35 10 mm in xyz<br />
Max. speed: 1.2 mm/s (depends on<br />
the controller)<br />
Mass:<br />
<strong>MX</strong> <strong>25</strong> 46 g<br />
<strong>MX</strong> 35 76 g<br />
Load characteristics<br />
Type of load<br />
Mx, My, Mz<br />
0.15 Nm<br />
Fx, Fy (jamming force) < 2 N<br />
Fz (jamming force) < 2 N<br />
Resolution (calculated)<br />
Single step ~ 450 nm<br />
1/16-step ~ 30 nm<br />
(with controller CU 30)<br />
1/64-step ~ 10 nm<br />
(with controller CF 30)<br />
Half step ~ <strong>25</strong>0 nm<br />
Double step ~ 900 nm<br />
(with controller CN 30)<br />
Guidance accuracy (without load)<br />
Vertical deviation < 2 µm<br />
Lateral deviation < 2 µm<br />
<strong>Miniature</strong> <strong>XYZ</strong> Positioner Part no.<br />
2 3<br />
Type <strong>MX</strong> <strong>25</strong> <strong>MX</strong> 35<br />
0 x<br />
Top plate Standard custom design<br />
design<br />
0 6 9<br />
Vacuum no 10 -6 10 -9<br />
<strong>MX</strong>.0 5.1 0<br />
mechOnics ag Unnützstr. 2B 818<strong>25</strong> Munich Fon +49 (0) 89/4202 4207 Fax +49 (0) 89/4202 4206 www.mechOnics.de
Micro<strong>positioner</strong>s<br />
Series <strong>MX</strong><br />
Drawings of the <strong>MX</strong> <strong>25</strong>:<br />
4<br />
4pin - inline socket/<br />
4pol. Steckerleiste<br />
8 ± 1 12 M1 - 3<br />
6.5 ± 1 12 M1-3<br />
35<br />
Drawings of the <strong>MX</strong> 35:<br />
4<br />
M1-3<br />
12<br />
8 ± 5<br />
4pin - inline socket/<br />
4pol. Steckerleiste<br />
14.5 ± 5 12<br />
M1 - 3<br />
45<br />
1.5 ± 1<br />
<strong>25</strong> 17<br />
Positionsensors Motor Controllers Customized Items Index<br />
35<br />
5.5 ± 5<br />
30.5<br />
10.5<br />
4.75<br />
5<br />
10.5<br />
4.75<br />
mechOnics ag Unnützstr. 2B 818<strong>25</strong> Munich Fon +49 (0) 89/4202 4207 Fax +49 (0) 89/4202 4206 www.mechOnics.de<br />
15<br />
3<br />
M2.3 - 5 20<br />
15<br />
7.5<br />
10<br />
M2.3 - 5<br />
20<br />
20 M2.3 - 5<br />
10<br />
4,65<br />
M2.5 - 5<br />
M2.5 - 5<br />
20
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