KrF Laser Development
KrF Laser Development
KrF Laser Development
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Elements of a Krypton Fluoride (<strong>KrF</strong>)<br />
electron beam pumped gas laser<br />
Energy + ( Kr+ F 2) ⇒ ( <strong>KrF</strong>)* + F ⇒ Kr + F 2 + hν (λ = 248 nm)<br />
Pulsed<br />
power<br />
Cathode<br />
Input <strong>Laser</strong><br />
(Front end)<br />
electron<br />
beam<br />
e-beam<br />
window<br />
(hibachi)<br />
Window<br />
<strong>Laser</strong> cell<br />
(Kr+F 2 +Ar)<br />
Typical e-beam: 500 -700 keV, 100 - 500 kA, 3000 – 12,000 cm 2<br />
<strong>Laser</strong> Gas<br />
Recirculator<br />
<strong>KrF</strong> laser<br />
Physics<br />
4
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