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Towards Large Area, Picosecond-Level Photodetectors - Capp.iit.edu

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Scale-Up of ALD Processing -- Beneq Reactor<br />

Arrived 18 May 2010<br />

Studying ALD on<br />

<strong>Large</strong> Surface <strong>Area</strong>s<br />

• 33mm disk surface area<br />

is 0.13m 2<br />

• 8”x8” surface area is<br />

6.4m 2<br />

• 20 MCPs area is 129m 2<br />

Development of <strong>Large</strong> <strong>Area</strong> Fast MCP <strong>Photodetectors</strong>, R. Wagner, Argonne, DOE Site Visit, 20100825<br />

Development of Lower Cost <strong>Large</strong> <strong>Area</strong> MCP Photodetector, R. Wagner, Argonne, LIGHT11, Ringberg Castle, 20111101<br />

Wednesday, August 25, 2010<br />

Friday, November 18, 2011<br />

Tray top Tray Bottom<br />

8”x8” tile<br />

Stackable 20cm × 20cm plate<br />

holders for multiple plate coating<br />

in Beneq Reactor<br />

8”x8” tile<br />

500 mm<br />

10 trays<br />

8<br />

36

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