Towards Large Area, Picosecond-Level Photodetectors - Capp.iit.edu
Towards Large Area, Picosecond-Level Photodetectors - Capp.iit.edu
Towards Large Area, Picosecond-Level Photodetectors - Capp.iit.edu
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Scale-Up of ALD Processing -- Beneq Reactor<br />
Arrived 18 May 2010<br />
Studying ALD on<br />
<strong>Large</strong> Surface <strong>Area</strong>s<br />
• 33mm disk surface area<br />
is 0.13m 2<br />
• 8”x8” surface area is<br />
6.4m 2<br />
• 20 MCPs area is 129m 2<br />
Development of <strong>Large</strong> <strong>Area</strong> Fast MCP <strong>Photodetectors</strong>, R. Wagner, Argonne, DOE Site Visit, 20100825<br />
Development of Lower Cost <strong>Large</strong> <strong>Area</strong> MCP Photodetector, R. Wagner, Argonne, LIGHT11, Ringberg Castle, 20111101<br />
Wednesday, August 25, 2010<br />
Friday, November 18, 2011<br />
Tray top Tray Bottom<br />
8”x8” tile<br />
Stackable 20cm × 20cm plate<br />
holders for multiple plate coating<br />
in Beneq Reactor<br />
8”x8” tile<br />
500 mm<br />
10 trays<br />
8<br />
36