Flow Control - DCU
Flow Control - DCU
Flow Control - DCU
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Au sarbeit ungde rStand ard-Ze le<br />
5.4.6 MegaMic-Valve Series of HSG-IMIT<br />
manufacturing of cover chip<br />
a<br />
Si<br />
e<br />
SiO2<br />
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b<br />
f<br />
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g<br />
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Microfluidics - Jens Ducrée <strong>Flow</strong> <strong>Control</strong> 78