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Design of high precision linear stage with double-sided multi ...

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errors occur in <strong>high</strong> <strong>precision</strong> <strong>linear</strong> <strong>stage</strong>s. Thus, force ripple must be compensated. In this paper, we<br />

proposed a simple method to reduce the ripple by current shaping.<br />

Keywords: Multi-segmented trapezoidal magnet array; Halbach magnet array; Linear motor; Force<br />

ripple

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