Design of high precision linear stage with double-sided multi ...
Design of high precision linear stage with double-sided multi ...
Design of high precision linear stage with double-sided multi ...
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Mechatronics Journal., Volume 16, Issue6, Pages 303-378 (July 2006)<br />
<strong>Design</strong> <strong>of</strong> <strong>high</strong> <strong>precision</strong> <strong>linear</strong> <strong>stage</strong> <strong>with</strong> <strong>double</strong>-<strong>sided</strong> <strong>multi</strong>-segmented<br />
trapezoidal magnet array and its compensations for force ripples<br />
By: Moon G. Lee, Young-Man Choi, Sung Q. Lee, Dae-cheol Lim, Dae-Gab Gweon<br />
Abstract<br />
Generally, <strong>linear</strong> motor is used as actuators for <strong>high</strong> <strong>precision</strong> <strong>stage</strong> which requires long stroke, <strong>high</strong><br />
speed and <strong>high</strong> <strong>precision</strong> capability. In order to meet the needs <strong>of</strong> <strong>high</strong> speed and <strong>high</strong> <strong>precision</strong>, it is<br />
important that the motor generates large force and has small size. In this paper we propose a <strong>linear</strong> motor<br />
<strong>with</strong> <strong>multi</strong>-segmented (MST) magnet array to maximize actuating force per unit volume. The MST<br />
magnet array is a modified version <strong>of</strong> standard Halbach magnet array. Each magnet in the MST magnet<br />
array has various shapes and dimensions while standard Halbach magnet array has identical magnets. In<br />
order to optimize the shapes and dimensions, design optimization <strong>of</strong> the motor is carried out and its<br />
performance is investigated. We conclude that the <strong>linear</strong> motor <strong>with</strong> the MST array can generate more<br />
actuating force per unit volume than the one <strong>with</strong> conventional magnet array and standard Halbach<br />
magnet array. A <strong>high</strong> <strong>precision</strong> <strong>stage</strong> is constructed using the optimized MST magnet array. Even though<br />
we obtain maximized actuating force, the flux density by the MST array is seriously distorted from ideal<br />
sinusoidal flux density <strong>with</strong> respect to mover position. This distorted flux density results in force ripples<br />
when we use three phase commutation. And no matter how small force ripples would be, serious tracking
errors occur in <strong>high</strong> <strong>precision</strong> <strong>linear</strong> <strong>stage</strong>s. Thus, force ripple must be compensated. In this paper, we<br />
proposed a simple method to reduce the ripple by current shaping.<br />
Keywords: Multi-segmented trapezoidal magnet array; Halbach magnet array; Linear motor; Force<br />
ripple