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22<br />

Georgeta Ionascu, Lucian Bogatu, Adriana S<strong>and</strong>u, Elena Manea, Ileana Cernica<br />

z<br />

x<br />

z G<br />

t 1<br />

(Si) t 2<br />

(SiO 2<br />

) t 3<br />

(polymer)<br />

Fig. 4. Succession <strong>of</strong> layers that compose the microcantilevers;<br />

the centroidal axis <strong>of</strong> the composite beam is marked<br />

In this case, the bending stiffness EI <strong>and</strong> density ρ are replaced in<br />

equations 1 <strong>and</strong> 2 with the composite bending stiffness EI <strong>and</strong> composite<br />

density ρ :<br />

N<br />

EI = ∑ E i I i<br />

i=<br />

1<br />

N<br />

∑ ρiti<br />

i=<br />

1<br />

ρ = N<br />

∑ ti<br />

i=<br />

1<br />

where: N – the number <strong>of</strong> layers in the composite cantilever, E i I i - the bending<br />

stiffness <strong>of</strong> the individual layers, ρ i – the density <strong>of</strong> the individual layers, t i – the<br />

thickness <strong>of</strong> the individual layers.<br />

The centroid coordinate (the location z G <strong>of</strong> the neutral plane) <strong>of</strong> the<br />

composite beam is found by:<br />

∑<br />

∑<br />

z G =<br />

Ei<br />

Ai<br />

zi<br />

Ei<br />

Ai<br />

(5)<br />

where<br />

t i<br />

= + ∑ − 1<br />

z i<br />

i<br />

t<br />

2 k=<br />

1 k<br />

(6)<br />

A i = bech<br />

ti<br />

(7)<br />

b1 l1<br />

+ b2l<br />

b 2<br />

ech =<br />

l1<br />

+ l2<br />

(8)<br />

b ech – is an equivalent width <strong>of</strong> a microbeam <strong>of</strong> constant width <strong>and</strong> mass<br />

equal to that one <strong>of</strong> the microcantilever <strong>of</strong> variable width (obviously, b ech = b for<br />

the microcantilever <strong>of</strong> constant width).<br />

A i – is the cross-sectional area <strong>of</strong> each individual layer.<br />

The individual moments <strong>of</strong> inertia I i <strong>of</strong> each layer are computed with the<br />

following equation:<br />

(3)<br />

(4)

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