modeling, simulation and technology of ... - Scientific Bulletin
modeling, simulation and technology of ... - Scientific Bulletin
modeling, simulation and technology of ... - Scientific Bulletin
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22<br />
Georgeta Ionascu, Lucian Bogatu, Adriana S<strong>and</strong>u, Elena Manea, Ileana Cernica<br />
z<br />
x<br />
z G<br />
t 1<br />
(Si) t 2<br />
(SiO 2<br />
) t 3<br />
(polymer)<br />
Fig. 4. Succession <strong>of</strong> layers that compose the microcantilevers;<br />
the centroidal axis <strong>of</strong> the composite beam is marked<br />
In this case, the bending stiffness EI <strong>and</strong> density ρ are replaced in<br />
equations 1 <strong>and</strong> 2 with the composite bending stiffness EI <strong>and</strong> composite<br />
density ρ :<br />
N<br />
EI = ∑ E i I i<br />
i=<br />
1<br />
N<br />
∑ ρiti<br />
i=<br />
1<br />
ρ = N<br />
∑ ti<br />
i=<br />
1<br />
where: N – the number <strong>of</strong> layers in the composite cantilever, E i I i - the bending<br />
stiffness <strong>of</strong> the individual layers, ρ i – the density <strong>of</strong> the individual layers, t i – the<br />
thickness <strong>of</strong> the individual layers.<br />
The centroid coordinate (the location z G <strong>of</strong> the neutral plane) <strong>of</strong> the<br />
composite beam is found by:<br />
∑<br />
∑<br />
z G =<br />
Ei<br />
Ai<br />
zi<br />
Ei<br />
Ai<br />
(5)<br />
where<br />
t i<br />
= + ∑ − 1<br />
z i<br />
i<br />
t<br />
2 k=<br />
1 k<br />
(6)<br />
A i = bech<br />
ti<br />
(7)<br />
b1 l1<br />
+ b2l<br />
b 2<br />
ech =<br />
l1<br />
+ l2<br />
(8)<br />
b ech – is an equivalent width <strong>of</strong> a microbeam <strong>of</strong> constant width <strong>and</strong> mass<br />
equal to that one <strong>of</strong> the microcantilever <strong>of</strong> variable width (obviously, b ech = b for<br />
the microcantilever <strong>of</strong> constant width).<br />
A i – is the cross-sectional area <strong>of</strong> each individual layer.<br />
The individual moments <strong>of</strong> inertia I i <strong>of</strong> each layer are computed with the<br />
following equation:<br />
(3)<br />
(4)