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11) Carefully replace the o-ring in its groove and replace the waste wafer fragment so<br />
that the o-ring is completely covered. Re-engage the vacuum chuck.<br />
12) Wipe the remaining spinner interior clean with tissue or cloth. If poor results are<br />
observed, dampen the tissue with DI water before wiping the spinner interior. For<br />
more extreme cases, use Liquinox and water to wash the interior before<br />
thoroughly rinsing away the Liquinox with DI water. Acetone will dissolve the<br />
plexiglass top, so do not use acetone close to the spinner top.<br />
13) Allow solvents to evaporate. If no other cause can be found for poor results,<br />
suspect the presence of solvents and allow more drying time.
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