IX-255 UV Laser Micromachining System - IPG Photonics
IX-255 UV Laser Micromachining System - IPG Photonics
IX-255 UV Laser Micromachining System - IPG Photonics
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<strong>UV</strong> LASER<br />
MICROMACHINING SYSTEM<br />
1.0 <strong>System</strong> Specifications<br />
Motion Control Electronics<br />
Air Bearing X-Y Part Positioning Stage<br />
X-Y Stage Specifications<br />
Z-theta Wafer Alignment Stage<br />
Z-axis Specifications<br />
Theta-axis Specifications<br />
Video Microsope <strong>System</strong><br />
<strong>IX</strong>-<strong>255</strong> <strong>UV</strong> <strong>Laser</strong><br />
<strong>Micromachining</strong> <strong>System</strong><br />
Up to 8 axes of servo or step motor control, integrated into single interface<br />
for all motorized components as well as the laser fire mechanism<br />
Linear glass scale encoders; Linear motor servo drive system<br />
Travel: Up to 150 mm diameter processing area<br />
Resolution: 0.1 μm<br />
Accuracy:
<strong>IPG</strong>’s <strong>IX</strong>-<strong>255</strong> <strong>Micromachining</strong> <strong>System</strong><br />
Flexible and Interchangeable Process Tool Workstation<br />
<strong>Laser</strong> Options<br />
• <strong>IPG</strong> Microsystems μExcimer<br />
• Available in 193 or 248 nm Configurations<br />
• Pulse Rate from 1-1000 Hz<br />
• Pulse Length Typically 10 ns<br />
Beam Delivery Options<br />
• Pre-set and Field Reconfigurable<br />
Beam Profiles Provide Selectable<br />
High Fluence to Large Field Operation<br />
• Pulse Energy Control with<br />
Programmable Variable Attenuator<br />
<strong>System</strong> Architecture<br />
• All Granite Beam Delivery and<br />
Stage Support Structure for<br />
Vibration Isolation and<br />
Minimized Thermal Drift<br />
• Front Door with <strong>Laser</strong> Safe<br />
Viewing Windows<br />
• Automated <strong>Laser</strong> Operation and<br />
Semi-automated Part Alignment<br />
Operation from HMI or G Code<br />
Programmable<br />
• Single <strong>System</strong> Control Software with<br />
Ergonomic-arm Mounted User Interface<br />
User Interface<br />
• Fully Integrated <strong>Laser</strong> and <strong>Laser</strong><br />
<strong>System</strong> Control with Single User Interface<br />
• Vision <strong>System</strong> for Easy Part Alignment<br />
and Process Inspection<br />
• Automatic Selection of up to Four Beam<br />
Imaging Masks<br />
• <strong>IPG</strong> Project Management Software and<br />
Intuitive Macro-building Utility for<br />
Fast Programming<br />
• DXF and CSV File Interface for<br />
Complex Pattern Input<br />
Part Handling Stage<br />
• X-Y-Z Theta Part Handling<br />
• 125 mm Diameter Standard Process Area<br />
• Optional 150 mm Diameter Process Area<br />
• Positional Accuracy
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