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Diamond-like carbon: state of the art

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434 A. Grill / <strong>Diamond</strong> and Related Materials 8 (1999) 428–434<br />

Ano<strong>the</strong>r variation <strong>of</strong> <strong>the</strong> diagram <strong>of</strong> Fig. 1 is presented [29] J.W. Ager, III, S. Anders, I.G. Brown, M. Nastasi, K.C. Walter,<br />

Surf. Coat. Technol. 91 (1997) 91.<br />

in Fig. 2 (after Ref. [60]), which shows that <strong>the</strong> dia-<br />

[30] S. Anders, D.L. Callahan, G.M. Pharr, T.Y. Tsui, C.S. Bhatia,<br />

mond-<strong>like</strong> <strong>carbon</strong> films, comprising sp3, sp2 and even Surf. Coat. Technol. 9495 (1997) 189.<br />

sp1 <strong>carbon</strong> bonds, have ranges <strong>of</strong> properties delimited [31] S. Reinke, W. Kulisch, Surf. Coat. Technol. 97 (1997) 23.<br />

by <strong>the</strong> properties <strong>of</strong> diamond, graphite and polymers. [32] M. Zhang, Y. Nakayama, J. Appl. Phys. 82 (1997) 4912.<br />

These ranges <strong>of</strong> properties <strong>of</strong> hydrogenated and non- [33] D.G. McCulloch, D.R. McKenzie, S. Prawer, A.R. Merchant,<br />

E.G. Gerstner, R. Kalish, Diam. Relat. Mater. 6 (1997) 1622.<br />

hydrogenated diamond-<strong>like</strong> <strong>carbon</strong> are summarized in<br />

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Table 1, toge<strong>the</strong>r with existing and potential applications [35] G.A.J. Amaratunga, S.R.P. Silva, Appl. Phys. Lett. 68 (1996) 2529.<br />

based on <strong>the</strong> specific properties <strong>of</strong> <strong>the</strong> material.<br />

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