Monolithic CMOS Pixel Detectors in Particle and Nuclear ... - SLAC
Monolithic CMOS Pixel Detectors in Particle and Nuclear ... - SLAC
Monolithic CMOS Pixel Detectors in Particle and Nuclear ... - SLAC
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PIXEL2002 - International Workshop on Semiconductor <strong>Pixel</strong> <strong>Detectors</strong> for <strong>Particle</strong>s <strong>and</strong> X-Rays<br />
Carmel Mission CA, USA, September 9-12, 2002<br />
Summary & Outlook<br />
Goals<br />
Grzegorz DEPTUCH<br />
deptuch@lepsi.<strong>in</strong>2p3.fr<br />
Whether the th<strong>in</strong> chips/ladders can be produced Improv<strong>in</strong>g fabrication yield <strong>and</strong><br />
demonstrate (yield) th<strong>in</strong>n<strong>in</strong>g technique as a post-process<strong>in</strong>g technology,<br />
Optimise granularity, readout speed <strong>and</strong> material budget to fit application<br />
requirements,<br />
Integrate functions lead<strong>in</strong>g to the on-l<strong>in</strong>e data sparsification (column parallel<br />
readout, on-pixel data process<strong>in</strong>g, etc., processes with ≥ 5 metal layers ☺<br />
to visible light application no limits from quantum efficiency),<br />
For some application e.g. consisit<strong>in</strong>g <strong>in</strong> low-energy (~10 keV) direct electron<br />
imag<strong>in</strong>g, - demonstrate back illum<strong>in</strong>ation (correlated with detector th<strong>in</strong>n<strong>in</strong>g),<br />
System <strong>in</strong>tegration - DAQ, mechanical support, cooll<strong>in</strong>g, etc,<br />
Underst<strong>and</strong><strong>in</strong>g radiation effects (ionis<strong>in</strong>g radiation) <strong>and</strong> improv<strong>in</strong>g radiation<br />
tolerance.<br />
(<strong>in</strong> contrast<br />
<strong>Monolithic</strong> <strong>CMOS</strong> <strong>Pixel</strong> <strong>Detectors</strong><br />
<strong>in</strong> <strong>Particle</strong> <strong>and</strong> <strong>Nuclear</strong> Physics<br />
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