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cSI PHOTOVOLTAIC SOLUTIONS - Manz

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LASER PROCESS<br />

<strong>SOLUTIONS</strong><br />

<strong>Manz</strong> is working intensively on new methods to increase both the efficiency of solar<br />

cells and throughput rates, while at the same time cutting solar cell manufacturing<br />

costs. To do so, <strong>Manz</strong> uses high-efficiency laser processes to achieve this goal.<br />

To generate a selective emitter, <strong>Manz</strong> uses a laser-based procedure developed by<br />

the ipe (University of Stuttgart, Institute for Physical Electronics). With this technology,<br />

using an additional laser-processing step, the level of doping under the contact<br />

structure, which is applied in a later stage of the process, is increased significantly.<br />

In conjunction with <strong>Manz</strong>’s HAP (high accuracy printer), an increase in the solar cell’s<br />

efficiency of up to 0.5% can be achieved. During the development of these systems,<br />

<strong>Manz</strong> ensured that existing cell production lines can be upgraded.<br />

<strong>Manz</strong>’s laser systems are applied for many other <strong>Manz</strong> high accuracy processes<br />

such as: Laser edge isolation, dielectric layer opening or laser drilling to generate<br />

back-contact cells such as MWT and EWT.<br />

Laser Edge Isolation Selective Emitter<br />

LASER EDGE ISOLATION<br />

Edge isolation by laser grooving<br />

High throughput of up to 2,400 wafer/h<br />

Safe wafer handling and lowest breakage rates<br />

Loading/Unloading from/into <strong>Manz</strong> Box/Cassette or alternative carrier<br />

Modular design – available as inline or stand-alone system<br />

Combination of high performance laser process with high precision machine<br />

allows a minimum “dead area” (≤ 100 µm)<br />

SELECTIVE EMITTER<br />

High throughput of up to 2,400 wafer/h<br />

Safe wafer handling – lowest breakage rates<br />

Increase of cell efficiency up to 0.5% in combination with high ohmic emitter<br />

and <strong>Manz</strong> HAP (high accuracy printing)<br />

Loading/Unloading from/into <strong>Manz</strong> Box/Cassette or alternative carrier<br />

Modular design – available as inline or stand-alone system<br />

17<br />

Minimum dead area<br />

of ≤ 100 µm<br />

Lowest breakage rates<br />

Increase cell efficiency up to 0.5%

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