cSI PHOTOVOLTAIC SOLUTIONS - Manz

METROLOGY
SOLUTIONS
Testing and measuring wafers and cells during manufacturing is an important means
of controlling the quality of manufactured cells. Even the tiniest mechanical defects
in the cells – such as micro-cracks, for example – can have a negative impact on the
efficiency of the entire module or render it completely unusable.
For the purposes of quality control, Manz manufactures complete wafer testing
systems, which are used by wafer manufacturers for their end-of-line inspection and
by cell manufacturers for their receiving inspections.
After further production steps, the cell testing and sorting modules in the backend
area of the plant measure the various levels of quality and sort each cell into
the designated module class. The cell testers are suitable for both end-of-line
inspections after manufacturing cells as well as for carrying out receiving
inspections when manufacturing modules.
All measurement systems are highly integrated into the testing machines and
therewith allow a maximum performance with respect to throughput and crossinformation
usage. The availability of I/V analysis, hot spot detection and electroluminescence
analysis integrated within one testing system will allow cell loss
analysis and automatically indicate process related issues.
Cell Tester Cell Sorter
All systems are equipped with Manz automation systems and guarantee the lowestpossible
breakage rates as well as a high level of tool availability and throughput.
Manz’s quality-control and metrology systems also test the quality of wafers and
cells in all important process steps within the production line, thereby increasing the
productivity of the systems and assuring the quality of the products.
INLINE WAFER TESTER / IWT 3600
Modular design:
Available as stand-alone system or integrated into frontend
Available inspection systems:
Geometry and chips
Micro crack inspection
Saw mark measurement
Bow measurement
Inspection contamination
Conductivity measurement
INLINE CELL TESTER / ICT 2400
Thickness measurement
TTV measurement
(Total Thickness Variation)
Charge carrier lifetime
measurement
Doping (p or n type)
Modular design:
Available as inline tester within Manz backend system or as stand-alone system
Your advantages:
Minimal breakage, high throughput
Cell transport to the test modules by
vacuum conveyor belt
Vision systems for precise positioning
and chip detection
High performance I-V curve
measurement with Xenon flash (h.a.l.m.)
Available inspection systems:
Electroluminescence inspection
Front side inspection
Rear side inspection
Color inspection
Hot Spot measurement
High-performance software for
linking the results of all test stations
(classification scheme)
Optional: Laser edge isolation
11
Increases cell efficiency
by precise testing and sorting
Loading from Manz stack box
Sorting module with 12 bins
High throughput of 3,600 wafer/h
Highly efficient
electroluminescence inspection
NEW: Identifies ‚Hot Spots‘
on solar cells and
increases the efficiency
of solar modules!