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Photosensitive Materials for Integrated Optic ... - ResearchGate

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166 P. V. S. Marques et al.<br />

Figure 21. Microphotograph of channel waveguides fabricated in hybrid sol-gel after exposure<br />

through a combined mask of Figure 14 and dissolution of non-polymerized areas.<br />

Figure 22. Transmission spectra of waveguide plus grating fabricated in hybrid sol-gel through a<br />

single exposure step.<br />

Acknowledgment<br />

This work was supported partially under project POCTI/ESE/43065/2001 and a Ph.D.<br />

fellowship SFRD/BD/4643/2001 awarded to P. J. Moreira, both with financial support of<br />

FCT–Fundação para a Ciência eaTecnologia. This work was also partially supported by<br />

the European Project PLATON (PLAnar Technology <strong>for</strong> <strong>Optic</strong>al Networks), action line<br />

IST-2002-4.8.3, contract number IST-2001-38168.

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