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American Association for Crystal Growth

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despite the large amount of chemical synthetic work<br />

into new sources. Research at all levels has generally<br />

moved from the basic underlying science of MOVPE<br />

to an emphasis on device applications as the technology<br />

has matured. Materials, such as the group III-nitrides<br />

and narrow gap semiconductors, continue to be studied<br />

and developed throughout the US and the world.<br />

Chemically-based vapor phase epitaxy continued<br />

to develop in the mainstream Si and SiGe technologies<br />

as well. The <strong>for</strong>mation of SiGe-based materials<br />

and devices was pioneered through the work of B. S.<br />

Meyerson (AACG Young Authors Awardee, 1987) at<br />

IBM using ultrahigh vacuum chemical vapor deposition<br />

or UHV-CVD. 34 The ultrahigh vacuum environment<br />

was critical to this technology and its application<br />

was motivated by an understanding of the chemical<br />

kinetics of SiO 2 <strong>for</strong>mation and decomposition developed<br />

at the City College of New York. 35 The role of<br />

surface-absorbed hydrogen in controlling the growth<br />

rate and stabilizing Si-SiGe heterojunction interfaces<br />

during growth became central to the <strong>for</strong>mation of many<br />

of these materials and devices. Hydrogen was strongly<br />

absorbed on the Si or SiGe surface and altered the surface<br />

transport and surface chemical reactions within the<br />

growth environment. The SiGe material system and its<br />

associated technology is now part of our mainstream<br />

high-per<strong>for</strong>mance electronics present in almost every<br />

computer.<br />

Nanostructures and nanopatterning have entered<br />

the realm of crystal growth. Formation of many<br />

nanostructures such as nanowires, and other morphologically<br />

interesting shapes such as tetrapods, nanocombs,<br />

and dendritic nanostructures, have all been<br />

<strong>for</strong>med by largely chemical processes. Most of these<br />

structures rely on the use of low temperatures where<br />

the crystal growth process is controlled by some aspect<br />

of surface transport or surface chemical kinetics and<br />

the differing growth rate behavior on specific facets of<br />

the growing crystallite. While many materials such as<br />

the oxides use hydrothermal processing, semiconductor<br />

nanowires have been largely <strong>for</strong>med using vapor phase<br />

processing. The vapor-liquid-solid (VLS) or vaporsolid-solid<br />

(VSS) growth modes of nanowires, while<br />

known from the early work of Wagner and co-workers<br />

at Bell labs, 36 was extended in many ways. The specific<br />

mechanisms of growth are still being investigated<br />

with the relative contributions of thermodynamics, surface<br />

transport and chemical kinetics being discussed<br />

Figure 9: The schematic process used by Lew and Redwing to<br />

produce large numbers of Si nanowires through the vapor-liquidsolid<br />

(VLS) process (Reprinted from ref. 43, Copyright 2003,<br />

with permission from Elsevier). They used a nanoporous anodized<br />

aluminum oxide template, which <strong>for</strong>ms ordered arrays of straight<br />

nanoscopic pores through the aluminum oxide layer, guiding the<br />

VLS growth.<br />

in the literature. In general, these processes rely on the<br />

catalytic decomposition of the gas phase source on the<br />

surface of the metallic drop to define the nanowire diameter<br />

and growth rate. The self-assembly of substrate<br />

materials into organized nanostructures has also been<br />

used as templates <strong>for</strong> nanowire growth. Anodized aluminum<br />

oxide (AAO) was used by J. Redwing (AACG<br />

Young Authors Awardee, 2000) to simultaneously <strong>for</strong>m<br />

a large number of silicon nanowires by growing within<br />

the hexagonal array of pores <strong>for</strong>med in the AAO, schematically<br />

shown in Figure 9. 37 These silicon-based<br />

nanowires potentially enable new devices such as axial<br />

pn junctions and transistors. The growth of nanostructured<br />

materials has expanded to encompass many industrial<br />

and university laboratories within the US and<br />

around the world. Nanostructure growth has provided<br />

interesting plat<strong>for</strong>ms <strong>for</strong> the study of the fundamental<br />

atomic scale processes important <strong>for</strong> crystal growth and<br />

could enable new technologies.<br />

The observation has been often made that modern<br />

science and engineering is witnessing a merging of<br />

the scientific disciplines, <strong>for</strong>ming ‘fuzzy’ boundaries<br />

between chemistry, physics, and the engineering disciplines.<br />

The evolution of crystal growth science and<br />

technology over the last 50 years has shown that our<br />

field has long been at the <strong>for</strong>efront of this interdisciplinary<br />

trend. Our field now spans the physical length<br />

scales from nanometers to meters, manipulating the<br />

surface chemistry, physical environment and the flows<br />

of heat and mass with new dimensions of understanding<br />

and prediction that spans similar length scales. The<br />

field of crystal growth continues to be at the heart of<br />

most of our advanced technologies and will continue to<br />

expand into the fields of biology and medicine. I hope<br />

that the progress and trends we have witnessed over the<br />

last half century will continue to keep crystal growth<br />

alive and well at the <strong>for</strong>efront (and center) of new materials<br />

and technologies.<br />

References<br />

1. G. K. Teal, M. Sparks and E. Buehler, Physical Review<br />

81 (4), 637 (1951).<br />

2. J. Czochralski, Z. phys. Chem. 92, 3 (1918).<br />

3. G. K. Teal, M. Spranks and E. Buehler, Proceedings of<br />

the Institute of Radio Engineers 40, 906-909 (1952).<br />

4. B. Lojek, presented at the 10th IEEE International<br />

Conference on Advanced Thermal Processing of<br />

Semiconductors - RTP 2002, 25-27 Sept. 2002,<br />

Piscataway, NJ, USA, 2002 (unpublished).<br />

5. H. T. Christensen, Gordon K., Patent No. 2692839 (Oct.<br />

26, 1954 1954).<br />

6. J. C. Marinace, USA Patent No. 3089788 (May 26, 1959<br />

1959).<br />

7. A. F. B. Braga, S. P. Moreira, P. R. Zampieri, J. M. G.<br />

Bacchin and P. R. Mei, Solar Energy Materials and Solar<br />

Cells 92, 418-424 (2008).<br />

8. H. C. Theuerer, J. J. Kleimack, H. H. Loar and H. Chris<br />

tensen, Proceedings of the Institute of Radio Engineers<br />

48 (9), 1642-1643 (1960).<br />

9. R. N. Hall and W. C. Dunlap, Physical Review 80, 467-<br />

468 (1950).<br />

10. J. O. McCaldin and A. E. Widmer, Journal of Physics<br />

and Chemistry of Solids 24 (9), 1073-1080 (1963).<br />

11. F. M. Rourke, J. C. Sheffield and F. A. White, Review of<br />

Scientific Instruments 32 (4), 455-456 (1961).<br />

12. J. K. Abrokwah, T. N. Peck, R. A. Walterson, G. E. Still<br />

man, T. S. Low and B. Skromme, Journal of Electronic<br />

Materials 12, 681-699 (1983).<br />

13. J. V. DiLorenzo and G. E. Moore, Jr., Journal of the<br />

Electrochemical Society 118, 1823-1830 (1971).<br />

14. D. W. Shaw, Journal of <strong>Crystal</strong> <strong>Growth</strong> 31, 130-141<br />

(1975).<br />

15. D. W. Shaw, Journal of the Physics and Chemistry of<br />

Solids 36, 111-118 (1975).<br />

16. J. L. Laporte, M. Cadoret and R. Cadoret, Journal of<br />

<strong>Crystal</strong> <strong>Growth</strong> 50, 663-674 (1980).<br />

17. J. B. Loyau, M. Oberlin, A. Oberlin, L. Hollan and R.<br />

Cadoret, Journal of <strong>Crystal</strong> <strong>Growth</strong> 29, 176-186 (1975).<br />

18. W. K. Burton, N. Cabrera and C. Frank, Philosophical<br />

Transactions of the Royal Society of London. Series A<br />

243 (866), 299-358 (1951).<br />

19. R. F. Sekerka, Journal of <strong>Crystal</strong> <strong>Growth</strong> 3-4, 71-81<br />

(1968).<br />

20. H. J. Leamy and K. A. Jackson, Journal of Applied<br />

Physics 42 (5), 2121 (1971).<br />

21. G. H. Gilmer and P. Bennema, Journal of Applied Phys<br />

ics 43 (4), 1347-& (1972).<br />

22. P. Capper and M. Mauk, Liquid Phase Epitaxy of Elec<br />

tronic, Optical and Optoelectronic Materials (Wiley-<br />

Interscience, New York, 2007).<br />

23. H. M. Manasevit, Journal of <strong>Crystal</strong> <strong>Growth</strong> 55 (1), 1-9<br />

(1981).<br />

24. G. B. Stringfellow, Organometallic vapor-phase epi<br />

taxy: theory and practice, 2 ed. (Academic Press, San<br />

Diego, CA, USA, 1998).<br />

25. I. P. Herman, in Annual review of physical chemistry<br />

(Annual Review, Palo, Alto, CA, USA, 2003), Vol. 54,<br />

pp. 277-305.<br />

26. N. Argaman and G. Makov, <strong>American</strong> Journal of Physics<br />

68 (Copyright 2000, IEE), 69-79 (2000).<br />

27. R. M. Watwe, J. A. Dumesic and T. F. Kuech, Journal of<br />

<strong>Crystal</strong> <strong>Growth</strong> 221, 751-757 (2000).<br />

28. P. H. Fuoss, D. W. Kisker, G. B. Stephenson and S.<br />

Brennan, Materials Science &amp; Engineering<br />

B (Solid-State Materials <strong>for</strong> Advanced Technology) 30,<br />

99-108 (1995).<br />

29. F. M. Ross, in Perspectives on Inorganic, Organic, and<br />

Biological <strong>Crystal</strong> <strong>Growth</strong>: From Fundamentals to<br />

Applications. Based on the lectures presented at the 13th<br />

International Summer School on <strong>Crystal</strong> <strong>Growth</strong>, 5-11<br />

August 2007 (<strong>American</strong> Insitute of Physics, New York,<br />

NY, USA, 2007), pp. 363-376.<br />

30. T. F. Kuech and E. Veuhoff, Journal of <strong>Crystal</strong> <strong>Growth</strong><br />

68, 148-156 (1984).<br />

31. J. W. Huang and T. F. Kuech, Applied Physics Letters<br />

65, 604-606 (1994).<br />

32. T. F. Kuech, R. Potemski, F. Cardone and G. Scilla,<br />

Journal of Electronic Materials 21, 341-346 (1992).<br />

33. R. M. Lum, J. K. Klingert and M. G. Lamont, Journal of<br />

<strong>Crystal</strong> <strong>Growth</strong> 89, 137-142 (1988).<br />

34. B. S. Meyerson, K. E. Ismail, D. L. Harame, F. K.<br />

LeGoues and J. M. C. Stork, Semiconductor Science and<br />

Technology 9, 2005-2010 (1994).<br />

35. G. Ghidini and F. W. Smith, Journal of the Electrochem<br />

ical Society 131, 2924-2928 (1984).<br />

36. R. S. Wagner and W. C. Ellis, Applied Physics Letters 4<br />

(5), 89-90 (1964).<br />

37. L. Kok-Keong, C. Reuther, A. H. Carim, J. M. Redwing<br />

and B. R. Martin, Journal of Vacuum Science & Tech<br />

nology B 20, 389-392 (2002).<br />

38. D. W. Shaw, Journal of the Electrochemical Society 117,<br />

683-687 (1970).<br />

39. D. W. Shaw, J. Cryst. <strong>Growth</strong> 31, 130-141 (1975).<br />

40. H. C. Casey and M. B. Panish, Heterostructure lasers.<br />

(Academic Press, 1978).<br />

41. Y. Mori and N. Watanabe, Journal of Applied Physics<br />

52, 2792-2798 (1981).<br />

42. F. M. Ross, Reports on Progress in Physics 73, 114501<br />

(114521 pp.) (2010).<br />

43. K. K. Lew and J. M. Redwing, Journal of <strong>Crystal</strong><br />

<strong>Growth</strong> 254, 14-22 (2003).<br />

AACG Newsletter Spring 2011 AACG Newsletter Spring 2011<br />

18 19

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