Turbomolecular Pumps MAG W 600 with integrated controller

Turbomolecular PumpsMAG W 600with integrated controllerTechnical Information 175.55.02

The new MAG W 600Wide-range turbomolecular pump with activemagnetic suspension and integrated controller.As an expert in high vacuum technology,Oerlikon Leybold Vacuum has along-term experience in the developmentand production of turbomolecularpumps.The products are designed tomeet the needs of the analytical andresearch market as well as the semiconductorand coating industry.We have an installed base of morethan 100,000 units in the field.More than 30 years experience withMAGLEV pumps in these industriesand close collaboration with majorOEMs positioned Oerlikon LeyboldVacuum as a leader for VacuumSolutions.MAG W 600 - an additionalmember of the new wide-rangeturbomolecular pump seriesFeatures at a Glance■ New 5-axis magnetic bearing anddrive system, combining highestreliability and efficiency with lowvibration and noise level■ Robust system performance,providing high pumping speeds andcompression ratios for all gases■ Integrated state-of-the-art converterfor bearing and drive system, eliminatingthe need for a conventionalbench-top controller solution andinterconnecting cables■ Innovative communication conceptby industrial communication modulesto meet current standards and futuretrends for easy integration intocustomer equipment■ Easy system integration due tocompact, space-saving designHeadquarter GermanyOerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 CologneT +49 (0) 221-347-0F +49 (0) 221-347-1250info.vacuum@oerlikon.comwww.oerlikon.comCustomer BenefitsAs an additional member of the newdesign platform of wide-range turbomolecularpumps with integratedelectronics, the 5-axis magneticallylevitated MAG W 600 fulfills customerexpectations:■ Highest pumping speed at minimumfootprint■ Setting new benchmarks onmaintenance-free systems■ Suitable for applications like analytical,thin film deposition or research anddevelopment, for example■ Flexibility due to the modular designconcept. Alternatively, the controllerwill be available as a bench-top unit(as from August 2007)Design Details■ Installation in any orientation■ DN 160 or 200 ISO-K and CFhigh vacuum connection■ DN 25 KF with clamp shoefore-vacuum connection■ DN 16 KF clamp shoe purge / ventport■ Optional water or air cooling■ CE and RoHS conform; UL fulfilled■ Two slots for industrial communicationmodules- Standard 9-pin 24 V SPS(PLC)-IO- Optional interfaces possible:Ethernet, ProfiBus, DeviceNet,RS232 / RS485Technical Data MAG W 600 MAG W 700Inlet flange DN 160 200Pumping speedN 2l/s 600 on requestH 2l/s 380 on requestHe l/s 540 on requestCompressionN 22,0 x 10 9H 23,2 x 10 3He 9,2 x 10 4Max. fore-vacuum pressure mbar 6Weight kg 17Ordering Information MAG W 600 iP* MAG W 700 iP*High vacuum flange size DN 160 DN 200- ISO-K P/N 410600V0505 410700V0505- CF P/N 410600V0506 410700V0506Power supply TURBO.POWER 500410300V0221Water cooling device410600V0101Air cooling device410600V0102DC cable (connection of power supply and contoller), 5 m 410300V2005Additional cables and accessoriesupon request* iP = integrated converter and purge/vent portBICOM 09157.02 - 175.54.02 0.1.03.07 pePrinted in Germany on chlorine-free bleached paper Technical alterations reserved