high purity (precision) pressure regulators - Fluid Process Control

UPR-1Precision Pressure RegulatorThe Model UPR-1 is the High Purity version of the GO RegulatorPR-1 whose design and performance reliability has been proven inover 30 years of field use. The UPR-1 design features includeinternal components with standard surface finishes better than 25Ra. This feature provides the Semiconductor end-user with aprecision pressure regulator, economically priced for applicationsranging from gas distribution to point of use in the manufacturingtool.Features & Specifications• 25 Ra Internal Surface Finish, Std.• C v Flow .025, .06, 0.2, and 0.5• 316L SS Body, Cap, Internals• Male, Female or Internally Machined VCR Compatible Ports• 1 x 10 -9 atm cc/sec, Inboard Leak SpecApplications• Bulk Inert Gas Distribution• Diffusion FurnacesOptions• Wetted Materials for Corrosive ServiceHastelloy• Epitaxial Reactors• Specialty Gas Distribution• Manufacturing Tool405 Centura CourtPO Box 4866Spartanburg, SC 29303tel 864.574.7966fax 864.587.5608www.goreg.comsales@goreg.com

UPR-1Precision Pressure RegulatorHow to OrderSee page 7 for standard configurations. For additional configurations consult the factory.See page 10 for port locations.Maximum Temperature & Operating Inlet PressuresSeat Material Maximum Temperature* @Maximum OperatingInlet PressureTefzel® 150° F (66° C) @ 3600 pisG (24.82 MPa)High Density Teflon® 150° F (66° C) @ 3600 psiG (24.82 MPa)PCTFE (formerly Kel-F 81) 175° F (80° C) @ 6000 psiG (41.37 MPa)Polyimide500° F (260° C) @ 3600 psig (24.82 MPa)175° F (80° C) @ 6000 psiG (41.37 MPa)500° F (260° C) @ 3600 psiG (24.82 MPa)PEEK175° F (80° C) @ 6000 psiG (41.37 MPa)*Temperatures in excess of 175° F (80° C) require the use of a metal knob or the tamper proof option.Tefzel® and Teflon® are registered trademarks of Dupont.Outline and Mounting DimensionsØ 2.00 (51 mm)Panel mount option requires1.300 (35.3 mm) minimumdiameter panel cut out4.96 (126 mm)Ø 2.12 (54 mm).750M5 X .25 MIN.FULL THDS. (2X).750 (19 mm)For flow curve information go to www.goreg.com/flow_UPR1.htm2

UCP-1Precision Pressure RegulatorThe model UCP-1 offers the user an ultra compact pressureregulator for use in high purity systems for the semiconductorindustry. Meeting the highest purity standards and low particlegeneration of the semiconductor industry, this unit features internalcomponents with standard surface finishes better than 25 Ra. TheUCP-1 was computer designed to ensure a laminar flow transitionfrom the flow control orifice to the outlet port. This design ensuresvirtually zero particle entrapment and efficient purge cycles.Features & Specifications• 316 Stainless Steel Construction• Outlet 10, 25, 50, 100, 250 and 500 psig• Inlet 300 psig max. with Viton®or Kalrez® Seats; 3600 psigmax. with Tefzel®, Polyimide, orKel-F Seats• C v Flow 0.025, 0.06, or 0.2• 1/4” Male or Female VCR Compatible• 1 x 10 -9 atm cc/sec, InboardLeak SpecApplications• Bulk Inert Gas Distribution• Diffusion Furnaces• Epitaxial ReactorsOptions• Corrosion Resistant Materials ofConstruction• 15 Ra. 10 Ra or 4 Ra internal surfacefinish• Specialty Gas Distribution• Manufacturing Tool405 Centura CourtPO Box 4866Spartanburg, SC 29303tel 864.574.7966fax 864.587.5608www.goreg.comsales@goreg.com

UCP-1Precision Pressure RegulatorHow to OrderSee page 8 for standard configurations. For additional configurations, consult the factory.See page 10 for port locations.Maximum Temperature & Operating Inlet PressuresSeat Material Maximum Temperature* @Maximum OperatingInlet PressureTefzel® 150° F (66° C) @ 3600 psiG (24.82 MPa)High Density Teflon® 150° F (66° C) @ 3600 psiG (24.82 MPa)PCTFE (formerly Kel-F81) 175° F (80° C) @ 6000 psiG (41.37 MPa)Polyimide 500° F (260° C) @ 3600 psiG (24.82 MPa)Polyimide 175° F (80° C) @ 6000 psiG (41.37 MPa)PEEK 500° F (260° C) @ 3600 psiG (24.82 MPa)PEEK 175° F (80° C) @ 6000 psiG (41.37 MPa)*Temperatures in excess of 175° F (80° C) require the use of a metal knob or the tamper proof option.Tefzel® and Teflon® are registered trademarks of Dupont.Outline and Mounting DimensionsØ 1.62 (41 mm)Panel mount option requires1.390 (35.3 mm) minimumdiameter panel cut out4.11 (104 mm).900 (23 mm).750 (19 mm)For flow curve information go to www.goreg.com/flow_ucp1.htm4

UPR-7High Flow Precision Pressure RegulatorThe high flow coefficient of the UPR-7 provides the user with a highpurity pressure regulator exhibiting very low droop characteristics.The combination of high flow and low droop makes the UPR-7 ideallysuited for bulk gas distribution applications. The Model UPR-7features fully electropolished internal components with standardsurface finishes better than 25 Ra. This feature provides thesemiconductor end-user with a precision pressure regulator,economically priced for applications ranging from gas distributionto point of use in the manufacturing tool.Features & Specifications• 25 Ra Internal Surface Finish, Std.• High Flow, C v 1.1• Low Droop Characteristics• 316L SS Body, Cap, Internals• Male, Female or Internally Machined VCR Compatible Ports• 1 x 10 -9 atm cc/sec, Inboard Leak SpecApplications• Bulk Inert Gas Distribution• Diffusion FurnacesOptions• Wetted Materials for Corrosive ServiceHastelloy, Monel• Epitaxial Reactors• Specialty Gas Distribution405 Centura CourtPO Box 4866Spartanburg, SC 29303tel 864.574.7966fax 864.587.5608www.goreg.comsales@goreg.com

Page7 UPR-1 Series - Pressure Reducing RegulatorMaterial of Body1 SS 316L, 3.70 End to End (1/4" VCR Only, See O&MD for Other End to End Dimensions)2 Hastelloy C, 3.70 End to End (1/4" VCR Only, See O&MD for Other End to End Dimensions)3 SS 316L, 4.12 End to End (1/4" VCR Only, See O&MD for Other End to End Dimensions)Port Configuration (Ref. Dwg. 102191)AProcess & Gauge port1 1/4" FVCR Process Ports, 1/4" FVCR Gauge Ports2 1/4" FVCR Process Ports, 1/4" Swivel MVCR Gauge Ports3 1/4" FVCR Process Ports, 1/4" IVCR Gauge Ports4 1/4" Swivel MVCR Process Ports, 1/4" FVCR Gauge Ports5 1/4" Swivel MVCR Process Ports, 1/4" Swivel MVCR Gauge Ports9 1/4" IVCR Process Ports, 1/4" IVCR Gauge PortsA 3/8" FVCR Process Ports, 1/4" FVCR Gauge PortsB 3/8" FVCR Process Ports, 1/4" Swivel MVCR Gauge PortsC 3/8" FVCR Process Ports, 1/4" IVCR Gauge PortsD 3/8" Swivel MVCR Process Ports, 1/4" FVCR Gauge PortsE 3/8" Swivel MVCR Process Ports, 1/4" Swivel MVCR Gauge PortsF 3/8" Swivel MVCR Process Ports, 1/4" IVCR Gauge PortsG 1/2" FVCR Process Ports, 1/4" FVCR Gauge PortsH 1/2" FVCR Process Ports, 1/4" Swivel MVCR Gauge PortsI 1/2" FVCR Process Ports, 1/4" IVCR Gauge PortsJ 1/2" Swivel MVCR Process Ports, 1/4" FVCR Gauge PortsSurface Finish of Diaphragm Cavity1

Page8 UCP-1 Series - Pressure Reducing Regulator1 S.S. 316L, StandardMaterial of BodyPort Configuration (Ref. Dwg. 102191)AProcess & Gauge ports1 1/4" FVCR Process Ports, 1/4" FVCR Gauge Ports2 1/4" FVCR Process Ports, 1/4" MVCR Gauge Ports4 1/4" Swivel MVCR Process Ports, 1/4" FVCR Gauge Ports5 1/4" Swivel MVCR Process Ports, 1/4" Swivel MVCR Gauge Ports7 1/4" Tube Stubs at all Ports, 3.43 End to End (1.000 Stubs)8 1/4" Tube Stubs at all Ports, 7.43 End to End (3.000 Stubs)M 1/4" Fixed MVCR Process Ports, 1/4" FVCR Gauge PortsN 1/4" Fixed MVCR Process Ports, 1/4" Swivel MVCR Gauge PortsO 1/4" Fixed MVCR Process Ports, 1/4" Fixed MVCR Gauge PortsSurface Finish of Diaphragm Cavity1

Page9 UPR-7 Series - Pressure Reducing Regulator1 SS 316L2 Hastelloy CMaterial of BodyPort Configuration (Ref. Dwg. 102191)AProcess & Gauge port3 1/4" FVCR Process Ports, 1/4" IVCR Gauge Ports4 1/4" Swivel MVCR Process Ports, 1/4" FVCR Gauge Ports7 1/4" IVCR Process Ports, 1/4" FVCR Gauge PortsA 3/8" FVCR Process Ports, 1/4" FVCR Gauge PortsD 3/8" Swivel MVCR Process Ports, 1/4" FVCR Gauge PortsG 1/2" FVCR Process Ports, 1/4" FVCR Gauge PortsI 1/2" FVCR Process Ports, 1/4" IVCR Gauge PortsJ 1/2" Swivel MVCR Process Ports, 1/4" FVCR Gauge PortsM 3/4" FVCR Process Ports, 1/4" FVCR Gauge PortsN 3/4" Swivel MVCR Process Ports, 1/4" Swivel MVCR Gauge PortsSurface Finish of Diaphragm Cavity1

PORT LOCATIONS (PRECISION PRESSURE REGULATOR)270˚OUTOUT IN OUT IN OUTIN180˚A B C0˚90˚OUTINOUTOUTINOUTOUTIN IN OUTIND E FOUTININOUTINOUT IN OUT IN OUTING H IOUTININOUT1/8 NPTOUTOUTINOUTOUT IN OUT IN OUTINJ K LOUTINOUTOUTINMOUT IN INQOUTVINOUTINOUTLOCATION OF PORTS FROMTOP VIEWIN10