Engineered Thermal Solutions for Industry - Durex Industries

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ADVANCED THERMAL SOLUTIONSFOR SEMICONDUCTORPROCESSINGHigh-performance electricplaten heaters and related productsare available from Durex for allaspects of the semiconductorproduction process.CVDPhotolithographyStrippingPVDEtchingProbingWafer AnnealingPlasma AshingFlat Panel6Durex engineers are specialistsin designing and building thermalprocessing solutions for themachinery and equipment OEM’sin service to the semiconductorindustry, as well as contract fabshops, sub-assemblers and otherswho work in this high-precisionmarket. All our capabilitiesdescribed previously are utilizedin this market, in which Durex is anacknowledged leader.The products shown here havebeen produced for specific customerapplications, but all are availablein the same or modified forms foryour use.BAKE PLATENSUtilizing state-of-the-art heatertechnology, Durex manufacturesprecision bake platens specifically forprocessing 200mm and 300mm wafers.These platens are cast from purealuminum (99.7%) to insure maximumoperating temperatures of 450°C (842°F)with minimum risk of processcontamination. The casting process iscontrolled to eliminate any defects in themachined surface or casting body causedby porosity. A mineral-insulated heatingelement distributed throughout thecasting provides surface temperatureuniformity to ± 1% or better of the processoperating temperature. A hard-anodizedfinish provides an abrasion-resistantdielectric barrier on the working surface.BAKE/CHILL PLATENSDurex bake/chill platens haveessentially the same operatingspecifications as our bake platens,with the addition of a cooling function.A precision formed cooling tube is addedas an integral component to the heaterassembly in the body of the casting.This function can be used to rapidlycool the working surface of the platenor to act as a heat exchanger for liquidsand gases. A pressure test on thefinished part assures the integrityof the cooling tube after the castingprocess. The platen can also includean integral temperature sensor as partof the assembly.
PEDESTAL HEATERSThese pedestals comprise a bake or chillplaten with an aluminum "shaft" attachedto the underside of the platen by electronbeam welding. A helium leak test insuresa vacuum tight assembly. The surface ofthe pedestal is precision machined witha flatness of ± 0.0005" and includes liftpin holes and proximity pins to customerspecifications. Various terminationoptions are available to customizethe cooling tube exits for new orexisting applications.HOT CHUCKSHot chucks or "heated tools" deliver preciseheat to wafers during the manufacturingprocess. These platens are individuallycustomized with vacuum channels on theworking surface, as well as specific pin holelocations and other surface or backsidemounting holes. Manufactured from purealuminum (99.7%), these hot chucks have atemperature uniformity of better than ± 1%of the process temperature and a flatnesstolerance of 0.0005" across the entire surface.A precision lapped surface is standard, witha hardcoat anodized finish available.HIGH-TEMPERATURE PLATENSWhen temperatures exceed the 450°C(842°F) range provided by aluminumplaten heaters, Durex offers a uniquehigh-temperature platen heater to extendthe range available for a machined heater.The heater body is typically constructedof stainless steel, with other materialssuch as Nickel, Inconel®, Copper orBronze available, as needed. Theassembly is provided as a singlecomponent. A precise groove is machinedinto the heater body, as determined by theheat profile requirements of the surface.A mineral-insulated heating element ispress-fit into the groove to guaranteeintimate contact with the heater body,which optimizes heater life andtemperature uniformity on the workingsurface. In addition to high-temperatureplatens, these units can be manufacturedas pedestals and welded vacuum tight.STANDARD PEDESTAL HEATERSThe standard pedestal heatersmanufactured by Durex are designedto provide a quick solution for waferprocessing applications. These heatersare designed specifically for 200mm and300mm wafers. This standard designusually eliminates the need for costlytooling and mold design associated withnewly designed custom heaters. Ideal forR&D, rapid prototyping and emergencyrepair. Made from 356 aluminumstandard, cleaned and packaged tocleanroom specification, shipped readyto use. A variety of options can beincorporated into the final product withno additional tooling or engineering cost,including 170.1 aluminum (99.7% pure),hard-coat anodized surface, lift pin holes,vacuum channels, sapphire balls for waferproximity spacing and several electricaltermination styles.7
Page 1 and 2: Engineered Thermal Solutions for In
Page 3 and 4: Isn't that exactly what you expect
Page 5: PrototypeYou work in a fast-paced,
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Page 11 and 12: WEDGE-LOCK MINI-COIL HEATERSIMMERSI
Page 13 and 14: OVER-THE-SIDE IMMERSION HEATERSL-sh
Page 15 and 16: CERAMIC/QUARTZ ELECTRIC HEATERSCERA
Page 17 and 18: FLEXIBLE HEATERSMOUNTING HOLES WITH
Page 19 and 20: INTERNAL THERMOCOUPLEA Type J therm
Page 21 and 22: MINERAL INSULATEDTHERMOCOUPLESWe cu
Page 23 and 24: FIXED BAYONET THERMOCOUPLESStraight
Page 25 and 26: SURFACE MOUNT RTD’SDurex RTD’s
Page 27 and 28: MINIATURE RTD’SDurex produces RTD
Page 29 and 30: TEMPERATURE CONTROLLERSQuailty has
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