Download edition 2006 - Siemens

More documents

Recommendations

Info

20 PROCESS EQUIPMENT Siemens instrumental in advancing new MVD technology Defining the progressive edge Applied MicroStructures Inc. (AMST) was formed in January 2003 based on extensive experience in the semiconductor equipment industries. In November 2005, the Delaware-based company received one of the first annual Nano 50 Awards. This is a distinguished honor, since the award recognizes the Top 50 technologies, products, and innovators that have significantly impacted, or are expected to significantly impact the field of nanotechnology. The winners of this award are considered the “best of the best” innovative people and designs that will move nanotechnology to key mainstream market. AMST’s contribution was its excellence in developing Molecular Vapor Deposition (MVD) technology. MVD is an enhanced vapor deposition process that incorporates plasma surface cleaning and newly advanced vapor delivery. One of AMST’s products, called MVD-100, is able to create single and multi-layer coatings using a low temperature sequential deposition process. This allows for improved film durability and surface coverage over a wide variety of substrates, including glass, plastics, polymers, metals and semiconductor devices. The MVD-100 was designed for automated processing in manufacturing with high throughput and process scalability. This results in high productivity and reduced costs for nano-scale device manufacturing. In the past, PLCs did not meet AMST’s demand for recipe remote upload/download, local data storage, data portability, hardware and software expandability, software modularity and re-usability. Furthermore, existing graphical user interfaces did not meet AMST’s technical demands for remote recipe configuration via Ethernet, recipe storage, and external compact flash port access. Highly scalable and automated AMST’s new MVD-100 tool design is based on a highly scalable and automated environment. AMST chose to use the Simatic S7-315-2DP programmable logic controller, since it met all of its technical needs and its modular design requirements. The frontend of AMST’s MVD-100 is powered by Simatic WinCC flexible engineering software, while the high performance and expandability of the Simatic MP 370 was exactly what AMST was looking for as an HMI. The MVD-100 is able to create single and multi-layer coatings using a low temperature sequential deposition process “The decisive reason for a new PLC and HMI solution was the reliability of Simatic S7-300 and the flexible WinCC platform. We wanted MVD to be modularly expandable, and Siemens had the engineered solutions and the wide range of products that coincided with our company’s growth,” explains Richard Yi, co-founder and vice president of operations at Applied MicroStructures Inc. AMST’s business is expected to grow as MVD applications gain ever-increasing traction in the marketplace. Simple, fast, modular and flexible – that is the new crop of next generation MVD tools emerging on the market. Siemens and its Simatic S7, Profibus, ProfiNet and WinCC technology are helping to enable this trend. � Richard Schuler, Siemens San Francisco E-mail: schuler.richard@siemens.com FabFocus 2006 AMST Infineon
NEWS FabFocus 2006 HyBrix documentation management system Future-proof management As an open, universal framework for managing the entire technical documentation of an enterprise, the HyBrix IT solution enables easy administration and maintenance of all document information via one central hub: the HyBrix Xportal. With XML (extensible markup language) as a common platform, standard document data such as Word files and CAD drawings are easily imported into HyBrix. Xportal manages access rights, supports workflow and translation management, and also offers an easy-to-use search engine. Moreover, the HyBrix Xportal can be designed as either a document management system or a content management system, or both, and for all types of output – whether e-learning modules, handbooks or electronic parts catalogs. Requiring very little customization on the customer side, HyBrix superbly supports editorial processes for the efficient creation, management and presentation of integrated technological documentation, also allowing for dynamic visualization of and access to various company data. Moreover, HyBrix provides tools for creating content in e-learning environments and helps to consolidate heterogeneous documents to form an integrated documentation system with Web capability. � For more information, visit: www.siemens.com/hybrix White paper with example implementation for mass flow controller In support of SEMI E54 research As the umbrella association for the semiconductor industry, the Semiconductor Equipment and Materials Institute (SEMI) defines standards for the industry. One of these standards – SEMI E54 – provides specifications for sensor/ actuator networks (SAN). The standard describes common object device models and, based on these specifications, also specific classes of object device models (e.g. mass flow controllers or vacuum pumps). Specifications for diagrams illustrating how these device models should be implemented together with the various fieldbus systems are also contained in the standard, including – as of April 2005 – a diagram of Profinet as a SEMI E54.14 standard. Siemens in cooperation with the Fachhochschule Nürnberg (University of Applied Sciences in Nuremberg, Germany) is currently lending its support and expertise to two graduate students, whose diploma theses focus on creating a prototype from this particular diagram for a mass flow controller. As the hardware platform of the project, the Development Kit Ertec 400 PN IO of Simatic Net features an evaluation board with an example implementation program of the Profinet stack based on Ertec 400. The objective of the research studies is to develop a better understanding of the E54.14 standard, to correct ambiguities, and to provide an example implementation for how semiconductor equipment suppliers can conveniently convert to Profinet, as well as how the SEMI standard can more easily be applied. � For more information, visit: www.siemens.com/simatic-net 21
Page 1 and 2: FabFocus Solutions for the Electron
Page 3 and 4: FACILITY AUTOMATION USFilter acquis
Page 5 and 6: FACILITY AUTOMATION Siemens Water T
Page 7 and 8: functions generally handle the data
Page 9 and 10: Integrated building and process aut
Page 11 and 12: Siemens AG also because we already
Page 13 and 14: ing and are familiar with the stren
Page 15 and 16: PROCESS EQUIPMENT Simatic and Sinum
Page 17 and 18: KUKA partners with Siemens to optim
Page 19: FabFocus 2006 With their confocal 3
Page 23 and 24: Siemens makes sensors market acquis

Download edition 2006 - Siemens

Create successful ePaper yourself

Delete template?

Save as template?