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Delivering Value<br />
Through Innovation<br />
Surface Mount Gas Delivery<br />
Accessories from Talon<br />
www.taloneng.com
A decade of innovation<br />
and value<br />
c<br />
For ten years, Talon Innovations has provided<br />
the semiconductor industry with precision<br />
components and assemblies for the manufacture<br />
of integrated circuits. Committed to innovation,<br />
our proprietary processes and tooling allow<br />
us to make superior components, which in<br />
turn help integrators and OEM manufactures,<br />
and Semiconductor Fabricators operate more<br />
efficiently.<br />
Talon now operates 24,000 square feet of<br />
ultra-clean manufacturing space, handling<br />
all phases of production from raw stock<br />
through electro-polishing, to clean room<br />
assembly, inspection and packaging. A single<br />
source supplier, Talon eliminates the need<br />
for multiple vendors, reducing costs and<br />
ensuring quality and reliability.<br />
Sandwich<br />
Check Valve<br />
o<br />
Talon provides a full line of standard components<br />
and fittings, as well as custom components<br />
and assemblies developed to meet even the<br />
most challenging requirements. If you need<br />
consulting help, our engineers have the tools<br />
and expertise to help you rapidly bring your<br />
concepts to life, right through full-scale<br />
production.<br />
2
Purity specifications<br />
Ultra-High Purity “H” and “U”<br />
Standard “S” Level<br />
Material Type<br />
Purity Characteristics<br />
316L VAR Stainless Steel,<br />
Surface Chemistry meets or<br />
exceeds SEMI E49.9 for<br />
Ultra-High Purity applications<br />
Other Materials Available Upon Request<br />
316L in accordance with<br />
ASTM A276 and A479<br />
Chromium-to-iron atomic<br />
percentage ratio equal to<br />
or greater than 1.5 within<br />
the first 20 Angstroms of<br />
the surface layer<br />
Chemically Passivated<br />
All “H” and “U” parts are<br />
electropolished<br />
316L VAR Stainless Steel<br />
Other Materials Available Upon Request<br />
316L in accordance with<br />
ASTM A276 and A479<br />
Sulfur Content %: ‹0.015<br />
Carbon Content %: ‹0.030<br />
Chemically Passivated<br />
“S” Level parts are not<br />
electropolished<br />
Materials<br />
Specifications<br />
Material Traceability<br />
Heat lot traceability is<br />
maintained throughout the<br />
process and can be marked on<br />
product at customer request.<br />
Heat lot traceability is<br />
maintained throughout the<br />
process and can be marked on<br />
product at customer request.<br />
Surface Finish Level<br />
Level “H” 6-10 Ra<br />
Level “U” 3-6 Ra<br />
Inspected in accordance<br />
with the ISO 4288 Profilmetry<br />
specification<br />
Level “S” is less than or<br />
equal to 16 Ra<br />
Cleaning and Packaging<br />
Clean-Room Certified<br />
Packaging<br />
Individually Double Bagged<br />
Internal Electropolished/Bath<br />
Electropolish/D.I. Rinse<br />
Bulk or Special Packaging Available<br />
Ultrasonic Clean and Rinse<br />
Individually Bagged<br />
Bulk or Special Packaging Available<br />
SPECIAL SIZES, CONFIGURATIONS, MATERIALS, AND PACKAGING ARE AVAILABLE UPON REQUEST.<br />
3
How to order<br />
Part Type Size Seal Number of Material Purity<br />
Type Ports Type Level<br />
Configuration<br />
How<br />
To<br />
Order<br />
18 = 1.125"<br />
24 = 1.500"<br />
24HF = 1.500" High Flow<br />
1 = C-Seal<br />
2 = W-Seal<br />
MTC = Modular Flow Thru Caps<br />
1 = 1<br />
2 = 2<br />
3 = 3<br />
MCP = Modular Component Ports<br />
MTP = Modular Top Plug<br />
MFC-Caps = MFC Flow Thru Caps<br />
MFC-Plug = MFC Plugs<br />
MFCV = Manifold Tube Check Valves<br />
Refer to<br />
individual parts<br />
page/location<br />
for options.<br />
MFR = Modular Flow Restrictors<br />
MMV = Modular Metering Valves<br />
MCV = Modular Check Valves<br />
TMCV = Top Mount Check Valves<br />
S = 316L VAR<br />
A = 316L<br />
B = 316L VIM/VAR<br />
N = Nickel 200<br />
M = Monel 400<br />
H = Hastelloy C-22<br />
S = Standard Finish<br />
H = High Purity<br />
U = Ultra-High Purity<br />
NOTE: Special sizes, configurations and materials are available upon request.<br />
4
Talon surface mount gas accessories<br />
Modular Flow Thru Caps<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER<br />
Modular<br />
Flow Thru Cap<br />
MTC-18-1-2<br />
MTC-24-1-3C<br />
2 – MTC-18-1-2<br />
1.125" C-Seal 3 Connected MTC-18-1-3-C<br />
1.12"<br />
3 Blank MTC-18-1-3-B<br />
2 – MTC-18-2-2<br />
1.125" W-Seal 3 Connected MTC-18-2-3C<br />
3 Blank MTC-18-2-3B<br />
2 – MTC-24-1-2<br />
1.50" C-Seal 3 Connected MTC-24-1-3C<br />
3 Blank MTC-24-1-3B<br />
2 – MTC-24-2-2<br />
1.50" 1.50" W-Seal 3 Connected MTC-24-2-3C<br />
3 Blank MTC-24-2-3B<br />
2 – MTC-24HF-1-2<br />
1.50" HF C-Seal 3 Connected MTC-24HF-1-3C<br />
3 Blank MTC-24HF-1-3B<br />
Modular<br />
Flow Thru<br />
Caps<br />
Modular<br />
Component<br />
Ports<br />
Modular Component Ports<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER<br />
p<br />
Modular<br />
Component Port<br />
MCP-18-1-1-1<br />
MCP-24-1-1-2<br />
1 1/4" Tube Stub MCP-18-1-1-1<br />
1/4" Male VCR MCP-18-1-1-2<br />
1.125" C-Seal 2 1/4" Tube Stub MCP-18-1-2-1<br />
1/4" Male VCR MCP-18-1-2-2<br />
3 1/4" Tube Stub MCP-18-1-3-1<br />
1.12"<br />
1/4" Male VCR MCP-18-1-3-2<br />
1 1/4" Tube Stub MCP-18-2-1-1<br />
1/4" Male VCR MCP-18-2-1-2<br />
1.125" W-Seal 2 1/4" Tube Stub MCP-18-2-2-1<br />
1/4" Male VCR MCP-18-2-2-2<br />
3 1/4" Tube Stub MCP-18-2-3-1<br />
1/4" Male VCR MCP-18-2-3-2<br />
1 1/4" Tube Stub MCP-24-1-1-1<br />
1/4" Male VCR MCP-24-1-1-2<br />
1.50" C-Seal 2 1/4" Tube Stub MCP-24-1-2-1<br />
1/4" Male VCR MCP-24-1-2-2<br />
3 1/4" Tube Stub MCP-24-1-3-1<br />
1/4" Male VCR MCP-24-1-3-2<br />
1 1/4" Tube Stub MCP-24-2-1-1<br />
1/4" Male VCR MCP-24-2-1-2<br />
1.50" 1.50" W-Seal 2 1/4" Tube Stub MCP-24-2-2-1<br />
1/4" Male VCR MCP-24-2-2-2<br />
3 1/4" Tube Stub MCP-24-2-3-1<br />
1/4" Male VCR MCP-24-2-3-2<br />
1 1/4" Tube Stub MCP-24HF-1-1-1<br />
1/4" Male VCR MCP-24HF-1-1-2<br />
1.50" HF C-Seal 2 1/4" Tube Stub MCP-24HF-1-2-1<br />
1/4" Male VCR MCP-24HF-1-2-2<br />
3 1/4" Tube Stub MCP-24HF-1-3-1<br />
1/4" Male VCR MCP-24HF-1-3-2<br />
5
Talon surface mount gas accessories<br />
Modular Top Plug<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS PART NUMBER<br />
Modular<br />
Top Plug<br />
Modular<br />
Flow Thru<br />
Cap<br />
MFC Plug<br />
MTP-18-1-2<br />
MTP-24-1-3<br />
Modular<br />
Top Plug<br />
1.12"<br />
1.50"<br />
1.125" C-Seal<br />
1.125" W-Seal<br />
1.50" C-Seal<br />
1.50" W-Seal<br />
1.50" HF CSeal<br />
2 MTP-18-12<br />
3 MTP-18-1-3<br />
2 MTP-18-2-2<br />
3 MTP-18-2-3<br />
2 MTP-24-1-2<br />
3 MTP-24-1-3<br />
2 MTP-24-2-2<br />
3 MTP-24-2-3<br />
2 MTP-24HF-1-2<br />
3 MTP-24HF-1-3<br />
MFC Flow Thru Caps<br />
PART TYPE SIZE (SQ.) SEAL TYPE PART NUMBER<br />
MFC-CAP-18-2<br />
MFC<br />
Flow Thru Cap<br />
1.12"<br />
1.50"<br />
1.125" C-Seal MFC-CAP-18-1<br />
1.125" W-Seal MFC-CAP-18-2<br />
1.500" C-Seal MFC-CAP-24-1<br />
1.500" W-Seal MFC-CAP-24-2<br />
MFC Plugs<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS PART NUMBER<br />
MFC Plugs<br />
1.12"<br />
1.50"<br />
1.125" C-Seal 1 MFC-PLUG-18-1-1<br />
1.125" W-Seal 1 MFC-PLUG-18-2-1<br />
1.50" C-Seal 1 MFC-PLUG-24-1-2<br />
1.50" W-Seal 1 MFC-PLUG-24-2-2<br />
MFC-PLUG-18-1-1<br />
Manifold Tube Check Valves<br />
PART TYPE TUBE O.D. LENGTH PART NUMBER<br />
1.40" MFCV-4-1.40<br />
Er<br />
MFCV-4-1-40<br />
Manifold Tube<br />
Check Valve<br />
1/4" 1.60" MFCV-4-1.60<br />
1.70” MFCV-4-1.70<br />
1.60" MFCV-6-1.60<br />
3/8"<br />
1.70" MFCV-6-1.70<br />
6
Talon surface mount gas accessories<br />
Modular Flow Restrictors<br />
PART TYPE<br />
SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER<br />
Modular<br />
Flow Restrictor<br />
1.125" C-Seal<br />
2 Side MFR-18-1-2-1<br />
Center<br />
MFR-18-1-2-2<br />
3 Side MFR-18-1-3-1<br />
MFR-18-1-3-2<br />
1.12"<br />
1.125" W-Seal<br />
1.50" C-Seal<br />
Center<br />
MFR-18-1-3-2<br />
2 Side MFR-18-2-2-1<br />
Center<br />
MFR-18-2-2-2<br />
3 Side MFR-18-2-3-1<br />
Center<br />
MFR-18-2-3-2<br />
2 Side MFR-24-1-2-1<br />
Center<br />
MFR-24-1-2-2<br />
3 Side MFR-24 1-3-1<br />
Modular<br />
Flow<br />
Restrictors<br />
Center<br />
MFR-24-1-3-2<br />
2 Side MFR-24-2-2-1<br />
1.50" 1.50" W-Seal<br />
Center<br />
MFR-24-2-2-2<br />
3 Side MFR-24-2-3-1<br />
Center<br />
MFR-24-2-3-2<br />
MFR-24-1-2-1<br />
1.50" HF C-Seal<br />
2 Side MFR-24HF-1-2-1<br />
Center<br />
MFR-24HF-1-2-2<br />
3 Side MFR-24HF-1-3-1<br />
Center<br />
MFR-24HF-1-3-2<br />
N<br />
Ordering Example<br />
Example Flow Restrictor Characteristics<br />
A center port 1.125” c-seal modular flow restrictor manufactured<br />
to flow 15 SLM of nitrogen at an inlet pressure of 30 PSIG and an<br />
outlet pressure of 0 PSIG.<br />
Corresponding Part Number: MFR-18-1-3-2-S-H-N2-15SLM-30-0<br />
Where,<br />
N2 is the gas type<br />
15 SLM is the flow rate in either SLM or SCCM<br />
30 is the inlet pressure in PSIG, and<br />
0 is the outlet pressure is PSIG<br />
7
Talon surface mount gas accessories<br />
Modular<br />
Metering<br />
Valve<br />
I<br />
Modular Metering Valves<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS FLOW RATE PART NUMBER<br />
Modular<br />
Metering Valve<br />
MMV-18-1-2-F<br />
1.125" C-Seal<br />
1.12" 1.125" W-Seal<br />
1.50"<br />
1.50" C-Seal<br />
1.50" W-Seal<br />
Please contact a Talon representative for specific flow rate and Cv information.<br />
2 Low MMV-18-1-2-LF<br />
High<br />
MMV-18-1-2-HF<br />
3 Low MMV-18-1-3-LF<br />
High<br />
MMV-18-1-3-HF<br />
2 Low MMV-18-2-2-LF<br />
High<br />
MMV-18-2-2-HF<br />
3 Low MMV-18-2-3-LF<br />
High<br />
MMV-18-2-3-HF<br />
2 Low MMV-24-1-2-LF<br />
High<br />
MMV-24-1-2-HF<br />
3 Low MMV-24-1-3-LF<br />
High<br />
MMV-24-1-3-HF<br />
2 Low MMV-24-2-2-LF<br />
High<br />
MMV-24-2-2-HF<br />
3 Low MMV-24-2-3-LF<br />
High<br />
MMV-24-2-3-HF<br />
2 Low MMV-24HF-1-2-LF<br />
1.50" HF C-Seal High MMV-24HF-1-2-HF<br />
3 Low MMV-24HF-1-3-LF<br />
High<br />
MMV-24HF-1-3-HF<br />
8
Talon surface mount gas accessories<br />
Modular Check Valves<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER<br />
Modular<br />
Check Valve<br />
MCV-24HF-1-3-2<br />
1.12"<br />
1.125" C-Seal<br />
1.125" W-Seal<br />
1.50" C-Seal<br />
2 Side MCV-18-1-2-1<br />
Center<br />
MCV-18-1-2-2<br />
3 Side MCV-18-1-3-1<br />
Center<br />
MCV-18-1-3-2<br />
2 Side MCV-18-2-2-1<br />
Center<br />
MCV-18-2-2-2<br />
3 Side MCV-18-2-3-1<br />
Center<br />
MCV-18-2-3-2<br />
2 Side MCV-24-1-2-1<br />
Center<br />
MCV-24-1-2-2<br />
3 Side MCV-24-1-3-1<br />
Modular<br />
Check Valves<br />
Manifold<br />
Tube Check<br />
Valve<br />
Center<br />
MCV-24-1-3-2<br />
2 Side MCV-24-2-2-1<br />
1.50" 1.50" W-Seal<br />
Center<br />
MCV-24-2-2-2<br />
3 Side MCV-24-2-3-1<br />
Center<br />
MCV-24-2-3-2<br />
MCV-18-1-3-2<br />
1.50" HF C-Seal<br />
2 Side MCV-24HF-1-2-1<br />
Center<br />
MCV-24HF-1-2-2<br />
3 Side MCV-24HF-1-3-1<br />
Center<br />
MCV-24HF-1-3-2<br />
Top Mount Check Valve<br />
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER<br />
Top Mount<br />
Check Valve<br />
TMCV-18-1-2-S-H<br />
2 Center TMCV-18-1-2-2<br />
1.125" C-Seal<br />
3 Center TMCV-18-1-3-2<br />
1.12"<br />
1.125" W-Seal<br />
2 Center TMCV-18-2-2-2<br />
3 Center TMCV-18-2-3-2<br />
1.50" C-Seal<br />
2 Center TMCV-24-1-2-2<br />
3 Center TMCV-24-1-3-2<br />
1.50" 1.50" W-Seal<br />
2 Center TMCV-24-2-2-2<br />
3 Center TMCV-24-2-32-2<br />
1.50" HF C-Seal<br />
2 Center TMCV-24HF-1-2-2<br />
3 Center TMCV-24HF-1-3-2<br />
C<br />
TMCV-24-1-2-S-H<br />
9
W-Seal specifications<br />
Typical dimensions shown. For specific sealing feature specifications contact Talon Innovations Corp.<br />
1.125" W-Seal Interface<br />
1.125"<br />
W-Seal<br />
Interface<br />
1.500"<br />
W-Seal<br />
Interface<br />
1.500" W-Seal Interface<br />
u<br />
10
C-Seal specifications<br />
Typical dimensions shown. For specific sealing feature specifications contact Talon Innovations Corp.<br />
1.125" C-Seal Interface<br />
1.125"<br />
C-Seal<br />
Interface<br />
1.500" C-Seal<br />
Interface<br />
1.500" High<br />
Flow C-Seal<br />
Interface<br />
1.500" C-Seal Interface<br />
1.500" High Flow C-Seal Interface<br />
s<br />
11
Talon Innovations<br />
1003 Industrial Drive South<br />
Sauk Rapids, MN 56379<br />
Phone: 320-251-0390<br />
Fax: 320-251-5810<br />
www.taloneng.com<br />
sales@taloneng.com<br />
Rely on Talon expertise<br />
No matter what your requirements,<br />
Talon Innovations has the tools and expertise<br />
to provide you with solutions that deliver<br />
precision, innovation, and real value.<br />
We now possess a decade of experience<br />
developing products proven to help<br />
semiconductor manufacturers reduce costs<br />
and increase productivity. We are<br />
committed to helping our customers<br />
achieve even greater performance<br />
and value in the decades to come.<br />
Contact a Talon representative today<br />
to learn more about our modular gas<br />
delivery systems, or any of our<br />
other quality products.
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