FUJIFILM MS3897A CCD Image Sensor Imager ... - Chipworks

FUJIFILM
MS3897A CCD Image Sensor
Overview 1-2
3.4.1 Minimum Pitch Vias
3.4.2 Minimum Pitch Contacts to Poly
3.4.3 Minimum Pitch Contacts to Diffusion
3.4.4 Minimum Width Contact
3.5.1 Minimum Poly Dimensions – Pixel Array
3.5.2 Dielectrics Beneath Poly 2 – TEM, Pixel Array
3.5.3 Detail of Dielectrics Beneath Poly 2 – TEM, Pixel Array
3.5.4 Interpoly Dielectric and Buffer Oxide
3.5.5 Minimum Pitch Poly
3.5.6 Amplifier Schematic
3.5.7 Output Amplifier Overview
3.5.8 T1 and Reset Transistors – Plan View
3.5.9 T1 Transistor Gate Length – Cross Section View
3.5.10 Reset Transistor Gate Length – Cross Section View
3.5.11 T2 Transistor – Plan View
3.5.12 T3 Transistor – Plan View
3.5.13 T4 Transistor – Plan View
3.5.14 T5 Transistor – Plan View
3.5.15 Detail of T5 Transistor – Plan View
3.5.16 T6 Transistor – Plan View
3.5.17 T7 and T8 Transistors – Plan View
3.5.18 Detail of T8 Transistor
3.6.1 Edge of FOX
3.6.2 Minimum Width LOCOS
3.7.1 SRP Profile of N-epi
3.7.2 SRP Profile Peripheral P-well
3.7.3 SRP Profile of Peripheral P-well – Detail
3.7.4 SRP Profile of Pixel Array Well Structure
4 Pixel Analysis
4.2.1 Silicon Nitride Microlens
4.2.2 Tungsten Light Shield
4.2.3 Array Corner – Dark and Active Pixels
4.2.4 Detail of Pixel Aperture
4.2.5 Pixel at Poly
4.2.6 Bevel Sample SCM of CCD Array
4.2.7 Substrate Sample SCM of CCD Array
4.3.1 Pixel at Poly – Planes of Cross-Sectioning
4.3.2 CCD Pixel Overview – Diagonal Cross Section
4.3.3 Pixel Aperture – Diagonal Cross Section (TEM)
4.3.4 Pixel Aperture – Diagonal Cross Section (SEM)
4.3.5 Pixel N-Photocathode and P-pinning Layer – SCM
4.3.6 Poly 1 Control Line – Transfer Site
4.3.7 Poly 1 Control Line – Transfer Site
Rev. 1.0 August 1, 2006 IPR-0607-803