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[news] - stangl.de

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page 4 [<strong>news</strong> Solar] | ISSUE 36 | SEPTEMBER 2009<br />

Process Equipment for Silicon Solar Technology<br />

Today´s dominating solar cell concept is based<br />

on cells ma<strong>de</strong> from crystalline silicon. STANGL<br />

provi<strong>de</strong>s completely automated solutions for<br />

polysilicon etching as well as treatment for Si<br />

wafers & cells in standard and high-efficiency<br />

production lines.<br />

MATERIA: Wet Chemical System for Polysilicon<br />

Chunk Etching, Cleaning & Drying<br />

The MATERIA PCE is a batch system for<br />

chemical etching, cleaning, and drying of<br />

polysilicon chunks. MATERIA is adapted to the<br />

high purity <strong>de</strong>mand in polysilicon production.<br />

Simultaneously, lowest possible total cost<br />

of ownership has been a key driver in the<br />

<strong>de</strong>velopment of this machine.<br />

SINGULAR – Modular Inline AR Coating System<br />

for c-Si Solar Cell Production<br />

First Machine Will Be Installed in October 2009<br />

Solar cell production is making the transition<br />

from the pioneering stage towards mass<br />

production. Innovative and flexible cell<br />

concepts <strong>de</strong>mand a mass production concept<br />

GERULUS: Wet Chemical System for Wafer<br />

Block Pre-Clean & Deglueing<br />

The STANGL GERULUS Pre-clean & Deglue<br />

system processes the wafers after being cut.<br />

This inclu<strong>de</strong>s removal of slurry as well as<br />

<strong>de</strong>glueing the wafers from their carrier beam.<br />

The GERULUS system can be configured in a<br />

wi<strong>de</strong> range to adapt to all kinds of slurry and<br />

glue types. To guarantee lowest possible water<br />

and surfactant consumption, the system can be<br />

equipped with a water & SiC recycling system.<br />

Wet Process Equipment for c-Si Solar Cells<br />

Batch-type Wet Benches of the SILEX series<br />

are the “workhorses” for cleaning and etching<br />

processes in Si-cell technology. Our machines<br />

are matched to the <strong>de</strong>mands of solar cell mass<br />

production by lowest cost of ownership, outstanding<br />

machine and process reliability as<br />

which is equally innovative and flexible, as the<br />

leap there from the laboratory is the most<br />

expensive step in the <strong>de</strong>velopment process.<br />

With the SINGULAR machine, SINGULUS offers<br />

a coating system which meets the <strong>de</strong>mands<br />

for both current and future PV cell production.<br />

The SINGULAR is a fully automated inline<br />

system consisting of in<strong>de</strong>pen<strong>de</strong>nt modules.<br />

The essential benefit of the inline technology<br />

is the transport and process of small substrate<br />

production lots, which guarantee stable and<br />

consistent processes, continuous output,<br />

flexibility and a small footprint.<br />

This inline coating machine has a capacity for<br />

the production of silicon solar cells in excess<br />

of 4500 wafer/h. Using the vacuum coating<br />

well as state-of-the-art <strong>de</strong>sign and technology.<br />

While SILEX wet benches are the first choice<br />

for cleaning and alkaline texturing of monocrystalline<br />

wafers, the manufacturing lines of<br />

multicrystalline solar cells preferably apply<br />

acidic texturing processes on inline-working<br />

machines. PSG Removal processes are running<br />

successfully in batch and inline-type equipment,<br />

following more or less the philosophy of the<br />

whole manufacturing process.<br />

Additionally, inline equipment permits single-si<strong>de</strong><br />

etching, applicable for edge isolation or si<strong>de</strong>selective<br />

surface treatment. STANGL’s new<br />

LINEA inline etching system can be configured<br />

up to max. 1700 or 3400 wafers per hour<br />

(156 mm), which equals a production capacity<br />

of 30 and 60 MW.<br />

process from other industrial appications the<br />

manufacture of anti-reflective layers on solar<br />

wafers will be fully automated. Due to the<br />

extremely high quality of the anti-reflective<br />

layer in the nanometer range, the light<br />

transmission and passivation characteristics<br />

will be improved and therefore the energy<br />

efficiency of the finished cells will be increased.<br />

With this step SINGULUS has <strong>de</strong>veloped a<br />

completely new work area in the solar market,<br />

which continues to grow long-term. The<br />

SINGULAR machine, which will be manufactured<br />

at SINGULUS in Kahl, is the logical addition<br />

to the front end area. It ties directly to the<br />

value-ad<strong>de</strong>d chain of the LINEA machine by<br />

STANGL. The LINEA cleans silicon solar cells<br />

followed by the coating process.

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