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Inline Wet Process Equipment for c-Si Solar Cell Production - stangl.de

Inline Wet Process Equipment for c-Si Solar Cell Production - stangl.de

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04<br />

Stangl <strong>Wet</strong> <strong>Process</strong> Machines in<br />

c-<strong>Si</strong> <strong>Solar</strong> <strong>Cell</strong> <strong>Production</strong> Lines<br />

Today´s dominating solar cell concept is based<br />

on cells ma<strong>de</strong> from crystalline silicon.<br />

STANGL provi<strong>de</strong>s complete automated dry-indryout<br />

solutions <strong>for</strong> wet treatment of <strong>Si</strong>-wafers in<br />

standard and high-efficiency cell lines.<br />

While batch-type working <strong>Wet</strong> Benches (SILEXseries)<br />

are the first choice <strong>for</strong> cleaning and alkaline<br />

texturing of monocrystalline wafers, the manufacturing<br />

lines of multicrystalline solar cells preferably<br />

apply acidic texture processes on inline-working<br />

machines. PSG Removal processes are running<br />

successfully in batch and inline-type equipment,<br />

following more or less the philosophy of the whole<br />

manufacturing process.<br />

Additionally inline equipment permits single-si<strong>de</strong><br />

etching, applicable <strong>for</strong> edge isolation or si<strong>de</strong>selective<br />

surface treatment.<br />

<strong>Si</strong>-<strong>Cell</strong> <strong>Production</strong> Step-by-Step: STANGL – LINEA STANGL SINGULUS – SINGULAR<br />

Wafer Multi/Mono Wafer Inspection Saw Damage Removal<br />

& Texturing<br />

<strong>Solar</strong> <strong>Cell</strong> Testing<br />

& Sorting<br />

Acidic Texturing (Iso Texturing)<br />

Edge Isolation Print & Fire Front-/<br />

Backsi<strong>de</strong> Contact<br />

Junction Formation Oxi<strong>de</strong><br />

Removal<br />

AR-Coating + Passivation,<br />

PECVD <strong>Si</strong>Nx, H<br />

P-Glass Removal<br />

<strong>Si</strong>ngle <strong>Si</strong><strong>de</strong> Etch Etch Isolation<br />

Emitter Etch<br />

AR-Coating & Passivation,<br />

PECVD <strong>Si</strong>Nx, H<br />

Maintenance & Support: Boat Cleaning Wafer Rework Chemical Supply Systems

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