Benchmark 5 Example

10
Expected challenges
� Find an efficient way to sample the layout to indentify the
potential locations that cause problems
� Calibration of locations where because of the hotspot
shapes are not small, the underlying calibration pattern is
wider (non square).
� There a hundreds of millions of structures in the layout
and yet the problem is that the amount of “bad” data in
real production is really small. However is significant
enough and the variants in layout so different that the
contest is a test to evaluate the potential of pushing the
state of the art to a region where methods can be useful.
ICCAD – November 2012
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