Benchmark 5 Example

4
Requirements on physical verification
� Be aware of anything that can go wrong in the fab and
prevent certain structures to appear in the layout to
maximize product yield.
� Many types of errors come from the FAB: Rapid thermal
anneal, etch and litho to name a few.
� Geometric checks have been the workhorse in physical
verification, and because they are intrinsically range
constraints they are able to cover (and eliminate) a large
number of difficult patterns.
� Models have been used when traditional rules would need
to be overly aggressive and thus open up more valid
topologies that otherwise would need to be constrained.
ICCAD – November 2012
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