GBS_smartWLI_extended

Peak Performance in
Optical 3D Surface Metrology
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Product Description
Optical 3d measuring device based on white-light interferometry
• designed as universal lab measuring system for R&D and quality control
• Speedytec
o massive parallel data processing on GPU’s
o extreme fast scanning
o real time 3d evaluation
o optimized for steep structures
o integrated data quality parameter for sample optimized filtering processes
• turret with up to 5 objectives
o manual exchangeable
o automated detection
o magnifications from 2.5x ... 100x
• push button scan and evaluation macros using smartVIS 3D as system- and MountainsMap as
evaluation software
• equipped with and xy-table
• manual positioning
• optional with automated positioning systems available
• automated stitching possible
• handling of up to app. 100 Mio. data points

Technical Product Specification
Measurement Technique
Dimension
Weight
Power Supply
Algorithms
Scanner
smartWLI extended
White-light interferometry
app. 450 x 360 x 260 mm³
app. 14 kg
Scan Range 500 µm
Resolution
System Software
Evaluation Software
Focus
xy-positioning
Tilt +-3°
100 to 240 VAC, 50/60 Hz
vertical scanning
phase shifting
combined method
Precision piezo drive with capacitive gauge control
Linearity 0.03 %
1 nm VSI
0.1 nm PSI
smartVIS 3D / Speedytec on GPU / real time 3D calculation
MountainsMap with GBS programmed extensions
70 mm fast and 1.9 mm fine manual z adjustment
manual xy table 73 x 55 mm²
motorized xy table 75 x 50 mm²
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Optical and Camera Configuration
high speed camera 1936 x 1216 pixel / 166 Hz
Scanning Speed
up to 250 µm/s – full camera resolution
Magnification 2.5x 5x 10x 20x 50x 100x
FOV / mm² 7.2 x 4.5 3.6 x 2.3 1.8 x 1.1 0.9 x 0.56 0.36 x 0.23 0.18 x 0.11
Spacing / µm 3.7 1.9 0.9 0.47 0.19 0.09
WD / mm 10.3 9.3 7.4 4.7 3.4 2
high resolution camera 2456 x 2054 pixel / 86 Hz
Scanning Speed
up to 120 µm/s – full camera resolution
Magnification 2.5x 5x 10x 20x 50x 100x
FOV / mm² 5.4 x 4.5 2.7 x 2.2 1.3 x 1.1 0.67 x 0.56 0.27 x 0.22 0.13 x 0.11
Spacing / µm 2.2 1.1 0.55 0.27 0.11 0.05
WD / mm 10.3 9.3 7.4 4.7 3.4 2
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Vertical Scanning using White-Light Interferometry (WLI)
Vertical Scanning Principle
• the Piezo lifts the objective in z axis and the camera the grabs images in equidistant steps
• the image stack contains the information to calculate the profile data from the surface
• each independent pixel will show an so named correlogram an the maximum sinus like light variation
indicates an defined z-distance from the objective

Interferometry, Interference Objectives, Principles
Exchangeable Interference Objectives
• Mirau objectives are used for higher
magnification (10x; 20x; 50x; 100x)
• Michelson objectives are used for lower
magnification (2.5x; 5x)
• the objectives are exchangeable and
this can be used to adapt the system to
the necessary field of view and
resolution
• interference pattern will pictured if
object and reference beam have the
same length
• the interferometry provides the extreme
height resolution of 0.1 nm for all
objectives (in contrary to other
principles as confocal microscopy and
focus variation)

GBS’s Speedytec - Power out of modern Graphic Boards
Speedytec - smartWLI’ s
• calculation on the graphic board
• sample: Tesla K40: 4290 GFOPS
• real time image processing
• optimized light sources
o enhanced coherence length
o processing of larger image
stacks
o better signal quality on
sloped objects
• improved phase shift algorithms
o
sub nanometer z - resolution
on higher objects
• high resolution cameras and xy
point densities
Traditional WLI
• calculation on the CPU
• sample: Core I7990x: 166 GFLOPS
• delayed image processing
• white light
o short coherence length
o processing of limited image
stacks
o limited quality on sloped
objects
o
phase shift algorithms
o
sub nanometer z – resolution
only on flat samples
• compromise between camera
resolution and speed

Shine Surfaces – Nozzle / polished Chrome Steel
flash
flash
camera image - interference patter
color coded 3d plot
Application nozzle scanning using an 50x objective
• interference patterns are very clear visible
• shine polished surfaces can easily be scanned
• the defect – flash in the upper sample area - can be detected and used to classify the sample

Transparent Surfaces – Hardness Test of an Optical Coating
smartVIS 3D
color coded 3d plot
Application hardness test on an optical coating using an 50x objective
• interference patterns are very clear visible
• shine polished surfaces can easily be scanned
• the defect – flash in the upper sample area - can be detected and used to classify the sample

High Lateral Resolution – Structured Wafer (ASIC)
Scanning of an structured wafer / ASIC using an 100x objective
• FOV 180 x 110 µm² point density 0.09 µm can be used to analyze the fine structures
• wall seize app. 1 µm

Fast Scanning of larger Objects – Insert app. 15 x 15 mm
Scanning of an insert using an
5x objective
• 5 min measuring time
• xy-table used for stitching
• data quality suitable for
roughness and form
measurement

Sub Nanometer Resolution for the Scanning of Glass Surfaces
µm
20
15
10
5
0
-5
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 m
micro lenses
nm
1
0
-1
-2
0 50 100 150 200 250 300 350 µm
flat partial area

Accurate Reproduction of Certified Step Heights
Calibrated standards are used for the verification of the
absolute measuring accuracy.

Without the Limitation of Stylus Tips
5 µ m
Resolving of much more finer details compared to
tactile scans with min tip radii of app. 2 ... 3 µm.
Algorithms for the compensation of the tactile limits
based on the high resolution data are part of the
software.
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Accurate Reproduction of Certified Roughness Parameters
certificate
Ra: 24.1
Uncertainty: +- 11 %
measurement results:
Ra / Average value:
Standard deviation:
24.24 nm
0.1 nm
Technical Specification
field of view: 1.9 x 1.1 mm²
scan time:
< 2 s
point density: 0.9 µm
z-resolution: 0.1 nm
24.500
24.400
24.300
24.200
Ra / nm
24.100
24.000
23.900
0 5 10 15 20 25 30
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Advantages of the smartWLI Technology
General advantages of the smartWLI technology
• easy handling
• short scanning time
• one button scan and evaluation possible
• optimized for shop floor and line integrated operation
• complete software based on MountainsMap with customized evaluation macros
• GBS programmed functional extensions
Compared to systems based on confocal measuring technologies
• extreme height resolution of 0.1 nm for all magnification / objectives
• no reduction of the height resolution for larger scanning areas in single scans
• independent height calculation of direct neighborhood points for improved xy resolution (in contrary to
the necessary correlation matric for focus variation which needs many points for contrast evaluation)
• without limitations as pinhole density of confocal microscopes
Compared to competitive systems with based on similar White-light interferometric technology
• Speedytec use the power of high speed graphic boards enable the systems to real time calculation of
the point cloud even for high speed high resolution matrix cameras
• improved algorithms provide a lower noise and better data quality on geometries with steep slopes and
samples with extreme black white differences
Customized solutions and automation
• GBS has the experience of app. 200 installed full automated systems
• R&D capacities - programmers and engineers can provide the solution for your specific task
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