Device simulation - Silvaco International

IMS CAD & Design Services
Atlas input structure
The physical structure built by Athena is used as input by Atlas to predict its
electrical behavior. The grid of the input structure is crucial for the device simulation.
There is a trade-off between
the requirements of accuracy
and numerical efficiency
Maria Concetta Allia
Accuracy requires a fine grid
Numerical efficiency is greater
when fewer grid points are used
The most efficient way to work is to allocate a fine grid only in critical areas and
a coarser grid elsewhere. Most critical areas tend to coincide with reverse biased
metallurgical junctions.
Typical critical areas
Transverse electric field under the MOSFET gate
Areas of considerable recombination effects
Areas of high impact ionization
Device
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