Nano-UHV50 - ultra high vacuum piezo XY stage - Mad City Labs

Nano-UHV50
Product Description
96
Features Typical Applications
4 UHV compatible construction
4 Two axis (XY)
4 50 µm x 50 µm ranges of motion
4 Bakeable to 100° C
4 Titanium or invar construction
4 sensor technology
4 Closed loop control
Nano-UHV50 constructed from titanium. Cables have Kapton insulation and silver plated copper shielding. The
15-pin, sub-D, vacuum compatible PEEK connector is wired to be compatible with vacuum feedthrough flanges.
The Nano-UHV50 is a two axis UHV compatible nanopositioning
system constructed from titanium or invar.
Made entirely from UHV compatible materials, the
Nano-UHV50 is bakeable to 100°C for vacuum applications
in the 10 -10 Torr range. A 1 inch (25mm) center
aperture provides an optical pathway or access for sample
holders. Internal position sensors utilizing proprietary
4 X-ray, VUV, and optical microscopy
4 Surface metrology
4 UHV atomic scale microscopy
4 Special designs - just contact us
with your requirements
LabVIEW Compatible
USB Interfaces
Examples, tutorial, and
Nano-Route ®
3D supplied
with Nano-Drive ®
USB
interfaces.
-------- technology provide absolute, repeatable position
measurement with picometer accuracy. Cable lengths
and connectors are customized for the actual installation.
Connector wiring is compatible with Accu-Glass Prod-
Colors:
Red = Pantone 193
ucts electrical Gray = Pantone feedthrough warm gray 6C
flanges - compatibility with
other types of flanges may be requested.
Note: Customized UHV stages are always welcome - just
email or call to discuss your special requirements.
www.madcitylabs.com sales@madcitylabs.com phone: 608-298-0855 fax: 608-298-9525

Technical Specifications
Range of motion (X) ............................................ 50 µm
Range of motion (Y) ............................................ 50 µm
Resolution (XY) .................................................. 0.1 nm
Resonant Frequency (X) ........................... 500 Hz ±20%
Resonant Frequency (Y) ........................... 250 Hz ±20%
Stiffness ...........................................................0.5 N/µm
θ roll , θ pitch (typical) ............................................... ≤1 µrad
θ yaw (typical) ...................................................... ≤3 µrad
Recommended max. load (horizontal)* .................0.5 kg
Recommended max. load (vertical)* ......................0.2 kg
Body Material .................................... Invar or Titanium
Controller .................................................. Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.
0.125
4 x 8-32 UNC through holes
provide mounting from below
1.000
1.250
Nano-UHV50
4 x C-bored for #6 SHCS
on a 1.00" x 2.00" rect.
2.750
1.250
4 x 6-32 UNC 0.250
on a 1.00" square
0.600
Dimensions are in INCHES
Drawing No.
NU52.07.B
www.madcitylabs.com sales@madcitylabs.com phone: 608-298-0855 fax: 608-298-9525
2.750
1.290
1.290
Note: All Dimensions in Inches
Colors:
Red = Pantone 193
Gray = Pantone warm gray 6C
DRAWING IS TO BE USED AS A GUIDE ONLY. DIMENSIONS ARE SUBJECT TO
CHANGE WITHOUT NOTICE. THE INFORMATION CONTAINED IN THIS DRAWING
IS THE SOLE PROPERTY OF MAD CITY LABS. ANY REPRODUCTION IN PART OR
AS A WHOLE IS PROHIBITED.
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