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Linear Shutters<br />
046<br />
Shutters<br />
Linear Shutters for <strong>UHV</strong><br />
Deposition<br />
<br />
<br />
<br />
<br />
<br />
Ideal for MBE and sputtering<br />
applications<br />
Fully bakeable to 250°C<br />
Based on MagiDrive technology<br />
Choice of blade size and material<br />
Dedicated shutter control unit<br />
available<br />
Introduction to Linear Shutters<br />
<strong>UHV</strong> <strong>Design</strong> manufacture a range of linear stroke<br />
shutters for fl ux switching various deposition<br />
sources. Originally designed for the demanding<br />
requirements of Molecular Beam Epitaxy, the low<br />
particulate generation of the shutter makes it<br />
ideal for production applications like sputtering.<br />
All products in this range are fully bakeable and<br />
constructed from materials compatible with ultra<br />
high vacuum.<br />
Rocking Beam Shutter<br />
<strong>UHV</strong> <strong>Design</strong>’s Rocking Beam Shutter relies on our<br />
MagiDrive range to pass motion into the vacuum<br />
envelope, eliminating the need for bellows. This<br />
elegant, simple and reliable pneumatically actuated<br />
component utilises a camshaft to reduce end of<br />
travel shock in high speed applications.<br />
The design ensures that only the rotating pivot<br />
bearings are inside the vacuum enclosure.<br />
All Linear Shutters have the option of molybdenum,<br />
tantalum, PBN or stainless steel shutter blades to<br />
suit customer requirements.<br />
For detailed specifi cations and customer drawings<br />
for this range of products please contact sales.<br />
www.uhvdesign.com sales@uhvdesign.com Tel:+44(0)1323 811188
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