W A F E R M A P S o f t w a r e W A F E R M A P S ... - Hologenix

WAFERMAP Software
[DISTRIBUTORS]
[ASEAN, CHINA,
INDIA]
(SINGAPORE, MALAYSIA, THAILAND,
INDONESIA, PHILLIPINES, ETC.):
Nanyang Equipment Pte. Ltd.
Singapore Office
6 New Industrial Road #06-02
Hoe Huat Industrial Building
Singapore 536199
Phone: +65-6487 4171
Fax: +65-6487 4167
E-Mail: sales@nanyange.com
[FRANCE]
John P Kummer Sarl
ZI de la Petite Montagne Sud
1, rue des Cevennes
CE 1738-91047 Evry Cedex
France
Phone: +33 (0) 1 64 97 58 44
Fax: +33 (0) 1 64 97 57 58
E-Mail: sales_fr@jpkummer.com
Web: http://www.jpkummer.com
[GERMANY]
John P Kummer GmbH
Steinerne Furt 78
D-86167 Augsburg
Germany
Phone: +49 (0) 821 74 87 20
Fax: +49 (0) 821 74 29 70
E-Mail: sales_de@jpkummer.com
Web: http://www.jpkummer.com
SYSTEM REQUIREMENTS
- Microsoft Windows 95, 2000
or XP Prof.
- PC fulfilling Microsoft minimum
requirements for the specific
Windows OS
- VGA (min. 640 x 480)
- 12 MB hard disk space
[JAPAN]
Hulinks, Inc.
Minami-Shinjuku Hoshino Bldg.
5-23-13 Sendagaya, Shibuya-ku
Tokyo 151-0051
Japan
Phone: +81-3 -5363-9041
Fax: +81-3-5363-9040
E-Mail: soft.sales@hulinks.co.jp
Web: http://www.hulinks.co.jp
[KOREA]
Altsoft, Inc
A-plus House 2F, 36-6 Samsung-Dong.
Kangnam-Gu, Seoul
135-090
Korea
Phone: +822-547-2344
Fax: +822-547-2343
E-Mail: altsoft@altsoft.co.kr
Web: http://www.altsoft.co.kr
[SWITZERLAND]
John P Kummer
John P Kummer AG
Zimmelstrasse 48
CH-6314 Unterägeri
Switzerland
Phone: +41 41 750 00 04
Fax: +41 41 750 02 45
E-Mail: john@jpkummer.com
Web: http://www.jpkummer.com
ALL OTHER COUNTRIES:
[TAIWAN]
Nanyang Equipment Technology Inc.
No. 29, Lane 576, Sec 1, Guang Fu
Road, HsinChu, Taiwan 30072
Republic of China
Phone: +886-3 666 8867 EXT 68
Fax: +886-3 666 9928
E-Mail: david@nanyange.com
[UNITED KINGDOM]
John P Kummer Ltd
121 High Street
Marlborough SN8 1LZ
England
Phone: +44 (0) 1672 518150
Fax: +44 (0) 1672 518159
E-Mail: sales_uk@jpkummer.com
Web: http://www.jpkummer.com
[USA, CANADA]
Hologenix, Inc.
15301 Connector Lane
Huntington Beach, CA 92649
U.S.A.
Phone: 714-903-5999
Fax: 714-903-5959
E-Mail: sales@hologenix.com
Web: http://www.hologenix.com
BO I N
scientific software
Boin GmbH
Haldenweg 25
89160 Tomerdingen
Germany
Phone +49 (0) 73 48 / 92 82 33
Fax +49 (0) 73 48 / 92 82 34
E-Mail: sales@boin-gmbh.com
Web: http://www.boin-gmbh.com
WAFERMAP Software
[SUPPORTED IMPORT FORMATS]
ASCII
Four Dimensions
CDE ResMap
Filmetrics 3.0 and 4.0
Jenoptik TWIN
KLA-Tencor RS100
KLA-Tencor F5
Nanophotonics
Nicolet
OPUS
Plasmos
The WAFERMAP Evaluation version
is available at no obligation for a 30
day trial period. You can download
it from http://www.boin-gmbh.com.
A CD-ROM Evaluation version is also
available.
Prometrix RS
Prometrix UV
QC Solutions SCP 7000
Rudolph
Sentech
SOPRA SE
Thermawave Optiprobe
Thermawave Thermaprobe
Additional import formats
can be implemented upon
request.
Import of data from metrology
tools that directly write
the WAFERMAP format:
E+H
Foothill
SigmaTech
Jenoptik
In developing a product that is truly making a difference
in semiconductor manufacturing, Boin GmbH
received the prestigious Editors Choice Best Product
Award 1999, presented annually by Semiconductor
International magazine, for its metrology software
WAFERMAP. Semiconductor International announced
20 winners whose products are making a difference
in semiconductor manufacturing.

WAFERMAP Software
WAFERMAP is an award winning software package used to collect, edit, analyze and visua-
lize measured physical parameters on semiconductor wafers.
WAFERMAP can import data files from various metrology tools such as ellipsometers,
thickness gauges and four point probes. The imported data can then be visualized or printed as
line scans, contour plots, 2D or 3D plots or as a histogram.
Several kinds of operations can be applied to the wafer maps such as rotation, shifting of the
grid in the X or Y direction, or mirroring the data along the X or Y axis. Global operations such
as adding or subtracting a constant or taking the 1st or 2nd derivative can be carried out. A
Sigma Filter allows for the elimination of sites that exceed a user-defined range (e.g. measurement
errors). In case of missing or invalid sites, a transformation to a standard circular or
Cartesian grid can be performed. Different grids can be merged into a single new one. It is also
possible to compare different sets of data by adding, subtracting or dividing entire wafer maps.
Maps can be exported to ASCII data files.
Typical applications include map generation for manually operated metrology tools and standardized
visualization for different automatic metrology equipment (e.g. different types of four
point probes in the same fab).
WAFERMAP allows users to work off-line and to analyze and edit metrology data outside
of the clean room. It is the perfect solution for paperless fabs.
WAFERMAP Software
[FEATURES]
+General
- Advanced xml-based Boin multi-column multi-wafer file format [NEW]
- Loading of multiple columns and wafers at once [NEW]
- Configurable 1D- (line scan), 2D- (contour or colored), 3D- (solid or wire frame),
3D bar chart-, value-, and sigma range plots
- Multicolor contour plot [NEW]
- Statistical analysis (histogram, calculation of mean, standard deviation,
max, min, etc.)
- Import functions for data from different metrology tools (see page 1)
- Import of data from metrology tools that directly write the WAFERMAP
file format (see page 1)
- Other import functions (e.g. ASCII files, OPUS)
- Export of *.jpg and *.bmp files [NEW]
- Export into *.html file format [NEW]
- Definition of any site pattern using a graphic editor
- Automatic generation of circular or Cartesian site patterns for any test diameter
- Extensive on-line help and HTML based user manual
+SPC
- Trend charts
- Trend lists
- X-Y-plots of statistical values [NEW]
- Global statistics (”All points, all wafers“)
- Browser
- Trend charts and lists can be sorted by any criterion (date & time, mean,
max, min, std. dev. etc.)
- Stacked maps
- Operations with files [NEW]
+Operations
- Global operations (add, subtract, divide, square, square root, etc.)
- 1st and 2nd derivative of a map
- File compare operations (add, multiply, ratio, average, etc.)
- File operations are applicable to files with different site distributions
- Shift (X and Y direction) and rotation of grids
- Mirroring of maps along the X and Y axis
- Averaging of radial zones
- Multiple files can be open simultaneously
- Multiple views of a single file can be selected and displayed simultaneously
- Multiple views can be printed on a single sheet, printouts are configurable
+Communication/Linking
- Inter-application communication via DCOM (ActiveX server)
[LICENSES]
+WAFERMAP for Windows
Stand Alone licenses
WAFERMAP for Windows EDUCATIONAL:
includes all graphics
WAFERMAP for Windows ADVANCED:
includes all graphics, ”Compare“,
”Operations“, and ”SPC“
WAFERMAP for Windows PROFESSIONAL:
includes all graphics, ”Compare“,
”Operations“, ”SPC“, ”Import“, and
”Export“
+WAFERMAP for Windows
other licenses
WAFERMAP for Windows PROFESSIONAL
Network License:
WAFERMAP for Windows PROFESSIONAL
Site License
WAFERMAP for Windows OEM Solutions