Formblatt Modulhandbuch - Engineering Physics
Formblatt Modulhandbuch - Engineering Physics
Formblatt Modulhandbuch - Engineering Physics
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<strong>Modulhandbuch</strong> B.Eng.<br />
Subjects of Specialisation<br />
Module description: Micro Technology (cos)<br />
Field: Specialisation Laser & Optics<br />
Course: Micro Technology<br />
Term: Winter<br />
Person in charge: Prof. Dr. Teubner<br />
Lecturer: Prof. Dr. Teubner<br />
Language: English (German)<br />
Curriculum correlation: Photonik (BA)<br />
Bachelor <strong>Engineering</strong> <strong>Physics</strong>, 5 th semester<br />
form/time: Lecture: 2 hrs/week<br />
Workload: Attendance: 28 hrs<br />
Self study: 62 hrs<br />
CP: 3<br />
Prerequisites acc. syllabus<br />
Recommended prerequisites:<br />
Aim: The students get introduced to the field of micro technology (MEMS<br />
and MOEMS) They should be able to work in that field in industry.<br />
Content: Materials for micro technology, thin layers, clean rooms, methods<br />
and processes for the generation and modification of thin films such<br />
as evaporation, sputtering, CVD, diffusion, doping etc., etching;<br />
special emphasis is put on lithographic methods and laser micro<br />
machining<br />
Assessment: 1 hr written final examination<br />
Media: black board, power point, practical work in the laboratory<br />
Literature: Mescheder: Mikrosystemtechnik (Teubner Verlag); Hilleringmann:<br />
Mikrosystemtechnik (Teubner Verlag); Völklein& Zetterer:<br />
Praxiswissen Mikrosystemtechnik (Vieweg)<br />
W. Menz, J. Mohr, O. Paul: Microsystem Technology<br />
Print ISBN: 9783527296347 Online ISBN: 9783527613007<br />
DOI: 10.1002/9783527613007<br />
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