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Andrey Chuvilin

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Contrast 100 1000<br />

Electron dose [e<br />

10000 100000 1000000<br />

‐ /nm2 ]<br />

Au 0.18 5.47 1.73 0.55 0.17 0.05<br />

Fe 0.08 12.75 4.03 1.28 0.40 0.13<br />

Si 0.05 19.95 6.31 2.00 0.63 0.20<br />

C 0.03 32.85 10.39 3.28 1.04 0.33<br />

HT ‐ 300kV, instrumental resolution ‐ 0.1 nm<br />

1000 e - /nm 2<br />

10 000 e - /nm 2<br />

100 000 e - /nm 2<br />

1 000 000 e - /nm 2<br />

Noise limited resolution [nm]<br />

Au Fe Si C

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