PMMA Data Sheet - MicroChem
PMMA Data Sheet - MicroChem
PMMA Data Sheet - MicroChem
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Refractive Index<br />
Film Thickness (Å)<br />
Film Thickness (Å)<br />
1.7<br />
1.65<br />
1.6<br />
1.55<br />
1.5<br />
1.45<br />
950<strong>PMMA</strong> C Resists<br />
Solids: 9% - 10% in Chlorobenzene<br />
55000<br />
50000<br />
45000<br />
40000<br />
35000<br />
30000<br />
25000<br />
C10<br />
20000<br />
15000<br />
10000<br />
C9<br />
500 1000 1500 2000 2500 3000 3500 4000 4500<br />
Spin Speed (rpm)<br />
25000<br />
20000<br />
15000<br />
10000<br />
5000<br />
0<br />
Figure 5<br />
950<strong>PMMA</strong> C Resists<br />
Solids: 2% - 7% in Chlorobenzene<br />
500 1000 1500 2000 2500 3000 3500 4000 4500<br />
Spin Speed (rpm)<br />
Figure 6<br />
Optical Properties<br />
495 and 950 <strong>PMMA</strong> Resists<br />
Cauchy Coeffiecients<br />
A B C<br />
495 <strong>PMMA</strong> 1.491 3.427 e-03 1.819 e-04<br />
950 <strong>PMMA</strong> 1.488 2.898 e-03 1.579 e-04<br />
0 300 500 700 900<br />
Wavelength (nm)<br />
Figure 10<br />
C7<br />
C4<br />
C2<br />
Film Thickness (Å)<br />
Film Thickness (Å)<br />
Refractive Index<br />
55000<br />
50000<br />
45000<br />
40000<br />
35000<br />
30000<br />
25000<br />
20000<br />
15000<br />
10000<br />
12000<br />
10000<br />
8000<br />
6000<br />
4000<br />
2000<br />
950<strong>PMMA</strong> A Resists<br />
Solids: 9% - 11% in Anisole<br />
500 1000 1500 2000 2500 3000 3500 4000 4500<br />
Spin Speed (rpm)<br />
Figure 7<br />
950<strong>PMMA</strong> A Resists<br />
Solids: 2% - 7% in Anisole<br />
A2<br />
0<br />
500 1000 1500 2000 2500 3000 3500 4000 4500<br />
1.7<br />
1.65<br />
1.6<br />
1.55<br />
1.5<br />
1.45<br />
Spin Speed (rpm)<br />
Figure 8<br />
Optical Properties<br />
Copolymer Resists<br />
0 300 500 700 900<br />
Wavelength (nm)<br />
A11<br />
A9<br />
Cauchy Coeffiecients<br />
A B C<br />
8.5 mEL 1.478 7.204 e-04 -3.478 e-04<br />
Figure 11<br />
A7<br />
A4
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