CBN Kaplama Teknolojisi ve Uygulamaları, Prof.Dr. Bilgin
CBN Kaplama Teknolojisi ve Uygulamaları, Prof.Dr. Bilgin
CBN Kaplama Teknolojisi ve Uygulamaları, Prof.Dr. Bilgin
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ATILIM<br />
ÜNİVERSİTESİ<br />
Intensity<br />
X-Ray photoelectron spectroscopy (XPS)<br />
197 195 193 191 189 187 185<br />
Binding Energy(eV)<br />
Intensity<br />
404 402 400 398 396 394 392<br />
Binding Energy (eV)<br />
XPS spectra of BN films(deposited at 200 ºC and 100 V) near the 1s binding energies<br />
of B and N atoms<br />
�Peaks of single chemical states (B1s and N1s) were re<strong>ve</strong>aled at<br />
binding energies of 190.3 and 397.5 respecti<strong>ve</strong>ly.<br />
�From compositional XPS analysis ratio of B/N=1.1 was deduced<br />
which indicates that nearly stoichiometric films ha<strong>ve</strong> been formed.<br />
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