Systems and References - Leybold Optics GmbH

SPECIAL SYSTEMS
Lab Family
Systems and
References

• T1600/TRIVAC D65 B + WSU 501
• gate valve DN 250
• PLC with touch screen terminal
• 3 x 4” cathode with reactive gas shower
• RF-plasma ion source
SYSTEMS
• rotary substrate heater table up to 600°C
• multilayer deposition
• co-sputtering
• ion beam etching SPECIAL
Lab 600 SP
Sputter Coater

• Ecodry 50 LR + WSU 501 / COOLVAC 2500
• gate valve DN 250
• 2 x e-gun ESV14
• 2 x e-gun controller EGC 38
• deposition controller IC/5
• 4 x crystal with shutter
• LAB plus control system
• End hall ion source with
hollow cathode neutralizer SPECIAL SYSTEMS
Lab 600 SP
Evaporation System

• Ecodry 50 LR + WSU 501 / COOLVAC 2500
• gate valve DN 250
• 2 x e-gun ESV14
• 2 x e-gun controller EGC 38
• deposition controller IC/5
• 4 x crystal with shutter
• LAB plus control system
• End hall ion source with
hollow cathode neutralizer SPECIAL SYSTEMS
Lab 600 H
Evaporation System

• Short coating cycle time due to use of
cryogenic pumping system
• Planetary substrate holder for uniform
coating of 3D parts
• Increased substrate capacity due to use
special rotation scheme
• The system can be equipped with
thermal evaporators or magnetrons
• Two doors for installation of process
equipment available
• Linear glow discharge for plasma clea-
ning and pre-treatment of substrates
SPECIAL SYSTEMS
Lab 600 H
Evaporation System

• COOLVAC 3.011 with ECODRY / WSU 251
• 2 x e-gun ESV 14/4
• 2 x e-gun controller EGC 38
• ECWR plasma source Cobra
• 2 x thermal evaporator
• UHV rotary substrate drive
• 3 x 19”cabinet with all integrated devices
• deposition controller IC5
• LAB plus control system
SPECIAL SYSTEMS
Lab 700
Evaporation System

• DIP12000 with TRIVAC D65B / RUVACWSU501
• 2 x e-gun ESV14/4
• 2 x e-gun controller EGC 38
• 3 x thermal evaporator
• deposition controller IC/5
• OMS3000 with test glass changer
• 2 x quartz lamp heater
• UHV rotary feedthrough with hollow shaft
and substrate palette
• LAB plus control system
SPECIAL SYSTEMS
Lab 900 EB
Evaporation System

• DIP1200
• SOGEVAC SV 300 / WSU 1001
• 2 x e-gun ESV 14/4
• 2 x e-gun controller EGC 38
• 2 x thermal evaporator
• 1 x End hall ion source with filament neutralizer
• 1 x deposition controller IC/5
• 2 x ceramic heater 5,2 kW
• LAB plus control system
SPECIAL SYSTEMS
Lab 1100
Evaporation System

• COOLVAC 10000 CL
• ECODRY LR 50 + Roots WSU 501
• Chamber heating system
• 6 x single pocket e-beam evaporator
• 4 x deposition controller XTC/2
• 1 x ECWR plasma source
• 1 x 16 cm Kaufman ion source
• LAB plus control system
SPECIAL SYSTEMS
Lab 1100 UHV
Evaporation System

• DIP 20000
• screwline SP 630 + Roots WAU 2001
• 4 x high volume thermal evaporator
• 4 x deposition controller XTM/2
• 4 x rotary substrate drive
SPECIAL SYSTEMS
Lab 1820
Evaporation System

• COOLVAC 3.011 with ECODRY / WSU 251
• 2 x e-gun ESV 14/4
• 2 x e-gun controller EGC 38
• ECWR plasma source Cobra
• 2 x thermal evaporator
• UHV rotary substrate drive
• 3 x 19”cabinet with all integrated devices
• deposition controller IC5
• LAB plus control system
SPECIAL SYSTEMS
BAK 760
Retrofit

CHINA
LEYBOLD OPTICS CHINA
#25, Kangsheng Industrial Park
No.11 Kangding Street
Beijing BDA, 100176, China
Phone: +86 10 67803366 - 0
Fax: +86 10 67803366 - 100
FRANCE
LEYBOLD OPTICS FRANCE
7 Avenue du Quebec
91140 Villebon sur Yvette
Z.A. de Courtaboeuf, France
Phone: +33 1 698248 - 12
Fax: +33 1 698248 - 40
GERMANY
LEYBOLD OPTICS DRESDEN
Zur Wetterwarte 50
Haus 303
01109 Dresden, Germany
Tel.: +49 351 86695 - 16
Fax: +49 351 86695 - 42
GREAT BRITAIN /
IRELAND
LEYBOLD OPTICS UK
St. Modwen Road, Stretford
Manchester M32 OZE, Great Britain
Phone: +44 161 86628 - 00
Fax: +44 161 86628 - 01
ITALY / AUSTRIA / SLOWENIA
LEYBOLD OPTICS ITALIA
Via Trasimeno 8
20128 Milano, Italy
Phone: +39 02 263050 - 84
Fax: +39 02 272096 - 95
HEADQUARTERS:
LEYBOLD OPTICS GmbH
Siemensstrasse 88
63755 Alzenau, Germany
Tel.: +49 6023 500 - 0
Fax: +49 6023 500 - 150
E-Mail: info@leyboldoptics.com
www.leyboldoptics.com
JAPAN
LEYBOLD OPTICS JAPAN
Kazama Bldg.
19-5, Nishi Shinbashi 2-chome,
Minato-ku, Tokyo, 105-0003 - Japan
Phone: +81 35 77755 - 51
Fax: +81 35 77755 - 53
KOREA
LEYBOLD OPTICS KOREA
# 1406, HyunDae 41 Tower, 917-9
Mok-1Dong, Yangcheon-Gu
Seoul 158-051, Korea
Phone: +82 2 2168 - 2136
Fax: +82 2 2168 - 2078
SPAIN / PORTUGAL
LEYBOLD OPTICS IBÉRICA
C/Carles Buigas 57-59
08980 Sant Feliu de Llobregat
Barcelona, Spain
Phone: +34 93 666 - 0778
Fax: +34 93 666 - 4612
TAIWAN
LEYBOLD OPTICS TAIWAN
82, Shien-Cheng 11th St., Chu-Bei City
302, Hsinchu County
Taiwan
Phone: +886 35 5831 - 23
Fax: +886 35 5831 - 39
USA / CANADA / SOUTH AMERICA
LEYBOLD OPTICS USA
539 James Jackson Ave.
Cary, NC 27513, USA
Phone: +1 919 65771 - 00
Fax: +1 919 65771 - 01
www.mbwm.de