Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
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• T1600/TRIVAC D65 B + WSU 501<br />
• gate valve DN 250<br />
• PLC with touch screen terminal<br />
• 3 x 4” cathode with reactive gas shower<br />
• RF-plasma ion source<br />
SYSTEMS<br />
• rotary substrate heater table up to 600°C<br />
• multilayer deposition<br />
• co-sputtering<br />
• ion beam etching SPECIAL<br />
Lab 600 SP<br />
Sputter Coater
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