Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
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• Ecodry 50 LR + WSU 501 / COOLVAC 2500<br />
• gate valve DN 250<br />
• 2 x e-gun ESV14<br />
• 2 x e-gun controller EGC 38<br />
• deposition controller IC/5<br />
• 4 x crystal with shutter<br />
• LAB plus control system<br />
• End hall ion source with<br />
hollow cathode neutralizer SPECIAL SYSTEMS<br />
Lab 600 SP<br />
Evaporation System
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