Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
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• COOLVAC 10000 CL<br />
• ECODRY LR 50 + Roots WSU 501<br />
• Chamber heating system<br />
• 6 x single pocket e-beam evaporator<br />
• 4 x deposition controller XTC/2<br />
• 1 x ECWR plasma source<br />
• 1 x 16 cm Kaufman ion source<br />
• LAB plus control system<br />
SPECIAL SYSTEMS<br />
Lab 1100 UHV<br />
Evaporation System
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