Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
Systems and References - Leybold Optics GmbH
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• COOLVAC 3.011 with ECODRY / WSU 251<br />
• 2 x e-gun ESV 14/4<br />
• 2 x e-gun controller EGC 38<br />
• ECWR plasma source Cobra<br />
• 2 x thermal evaporator<br />
• UHV rotary substrate drive<br />
• 3 x 19”cabinet with all integrated devices<br />
• deposition controller IC5<br />
• LAB plus control system<br />
SPECIAL SYSTEMS<br />
BAK 760<br />
Retrofit
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