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Systems and References - Leybold Optics GmbH

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• Short coating cycle time due to use of<br />

cryogenic pumping system<br />

• Planetary substrate holder for uniform<br />

coating of 3D parts<br />

• Increased substrate capacity due to use<br />

special rotation scheme<br />

• The system can be equipped with<br />

thermal evaporators or magnetrons<br />

• Two doors for installation of process<br />

equipment available<br />

• Linear glow discharge for plasma clea-<br />

ning <strong>and</strong> pre-treatment of substrates<br />

SPECIAL SYSTEMS<br />

Lab 600 H<br />

Evaporation System

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