nCount Shuttle - Kleindiek Nanotechnik
nCount Shuttle - Kleindiek Nanotechnik
nCount Shuttle - Kleindiek Nanotechnik
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<strong>nCount</strong> <strong>Shuttle</strong><br />
Reliable automated cell counting<br />
When performing failure analyis on semi-con-<br />
ductor devices with regular structures such as<br />
memory chips (SRAM, DRAM), liquid crystal dis-<br />
plays (LCD), and charge coupled devices (CCD), it<br />
is sometimes necessary to address a certain posi-<br />
tion on the sample. Traditionally, specific sites are<br />
reached by manually counting cells (e.g. in DRAM<br />
chip) to find the target cell, known to be malfunc-<br />
tioning, for further investigation. Navigating to<br />
the target cell can be tedious as well as difficult<br />
due to the following reasons:<br />
Conventional SEM & FIB microscope stages are<br />
not accurate enough and may jump several<br />
hundred nanometers<br />
Smooth and constant speed movements are not<br />
always possible with the microscope stage<br />
Many microscope stages exhibit creeping and<br />
drift after stopping<br />
Cell counting is a tiring task and the operator<br />
easily loses track<br />
<strong>nCount</strong> <strong>Shuttle</strong><br />
Scanning Electron Semiconductor<br />
& Focused Ion Beam Microscopy<br />
Solution: <strong>nCount</strong> <strong>Shuttle</strong> Package<br />
<strong>nCount</strong> <strong>Shuttle</strong> with integrated LT3310XYR<br />
three-axis high precision substage<br />
Load lock compatibility for high sample<br />
through-put<br />
Innovative image recognition software for auto-<br />
mated cell counting<br />
No restrictions<br />
The <strong>nCount</strong> <strong>Shuttle</strong> replaces the standard sam-<br />
ple holder and the sample is mounted on the<br />
substage<br />
The <strong>nCount</strong> <strong>Shuttle</strong> mounted on the microscope stage<br />
The <strong>nCount</strong> <strong>Shuttle</strong>, including the sample, is in-<br />
serted through the load-lock just like a standard<br />
sample holder<br />
Sliding contacts mounted to the microscope stage<br />
The normal use of standard probe holders for<br />
other applications is not limited in any way
Advantages<br />
Easy to operate — joystick control allows intui-<br />
tiv control for quickly finding the target area<br />
Sliding contacts for the substage ensure that<br />
there are no cabling hazards and that full rota-<br />
tion of microscope stage is possible<br />
< 1 nm resolution in fine mode<br />
Allows smooth movement at any magnification<br />
Stops immediately and does not creep<br />
Fast setup and removal<br />
Key specifications<br />
Travel XY: 10 mm<br />
Travel R: 360° unlimited<br />
Speed: up to 1 mm/s<br />
Step resolution: < 1 nm<br />
Drift: 1 nm/min<br />
Scanning Electron Semiconductor<br />
& Focused Ion Beam Microscopy<br />
Reliability: One year endurance test<br />
Automation of cell counting<br />
LT3310XY substage mounted on a Hitachi S-4800 Type II microscope stage<br />
<strong>nCount</strong> software allows automatic cell counting<br />
in combination with the LT3310XY & LT3310XYR<br />
substages<br />
It is fast and reliable — user input is reduced to<br />
just three clicks<br />
Further information<br />
Contact us at info@kleindiek.com<br />
Find your local agent at www.kleindiek.com<br />
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice. Version 7.03. © <strong>Kleindiek</strong> <strong>Nanotechnik</strong> GmbH.
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