SEM & FIB Interfacing Solutions for the MM3A - Kleindiek Nanotechnik
SEM & FIB Interfacing Solutions for the MM3A - Kleindiek Nanotechnik
SEM & FIB Interfacing Solutions for the MM3A - Kleindiek Nanotechnik
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<strong>SEM</strong> & <strong>FIB</strong> <strong>Interfacing</strong> <strong>Solutions</strong><br />
<strong>for</strong> <strong>the</strong> <strong>MM3A</strong>-EM Micromanipulator
» Fast setup and removal » Excellent stability » No restrictions on microscope functionality » System can be dependent or independent from microscope stage movements<br />
Bridge mount<br />
Door mount<br />
Flange mount<br />
FEI Nova Nanolab 200<br />
Zeiss 1540XB<br />
Baltec Tescan<br />
Cambridge<br />
Bridge Door Flange GIS-port Loadlock Roof Stage Universal<br />
200 nn<br />
250 nn<br />
Credence<br />
IDS10000 nn<br />
Hitachi<br />
S-2380 nn<br />
S-2700 n n nn<br />
S-3400N nn n n<br />
S-3500N nn<br />
S-4500 n nn<br />
S-4700 n nn n<br />
S-4800 nn n<br />
SU-70 nn n<br />
TM-1000 nn<br />
Jeol<br />
JSM-5510 nn<br />
JSM-6100 nn<br />
JSM-6400 nn<br />
JSM-6500F nn n n n<br />
JSM-6700F nn n n n<br />
JSM-7000F nn n n n<br />
JSM-7000Fabrica nn n n n<br />
JSM-7400F nn n n n<br />
JSM-7401 nn n n n<br />
Fur<strong>the</strong>r in<strong>for</strong>mation<br />
nn Recommended interfacing solution<br />
Additional OEM interfacing solutions designed by Jeol, Tescan, SII & Zeiss are available when purchas-<br />
ing an <strong>MM3A</strong>-EM system toge<strong>the</strong>r with a new <strong>SEM</strong> or <strong>FIB</strong>. Please contact <strong>the</strong> respective manufacturer <strong>for</strong><br />
more in<strong>for</strong>mation.<br />
New and/or customised mounting solutions are available on request.
» Fast setup and removal » Excellent stability » No restrictions on microscope functionality » System can be dependent or independent from microscope stage movements<br />
GIS-port mount<br />
Ex-situ mount (light microscope)<br />
Loadlock mount<br />
FEI Quanta 200 3D<br />
Olympus BX51<br />
Hitachi SU-70<br />
FEI<br />
Bridge Door Flange GIS-port Loadlock Roof Stage Universal<br />
<strong>FIB</strong> 611 nn<br />
Helios NanoLab nn n n n<br />
Helios NanoLab 400 nn n n<br />
Helios NanoLab 400S nn n n<br />
Inspect F nn n n n<br />
Inspect S nn n n n<br />
Micrion 2500 nn<br />
Nova NanoLab 200 nn n n n n n<br />
Nova NanoLab 600 nn n n n<br />
Nova Nano<strong>SEM</strong> 200 nn n n n<br />
Nova Nano<strong>SEM</strong> 400 nn n<br />
Nova Nano<strong>SEM</strong> 600 nn n n n<br />
Quanta 200 nn n n n<br />
Quanta 200 FEG nn n n n<br />
Quanta 3D nn n n n n n<br />
Quanta 3D FEG nn n n n n n<br />
Quanta 3D MKII nn n n n n n<br />
Quanta 400 nn n<br />
Quanta 400 FEG nn n<br />
Quanta 600 nn n n<br />
Quanta 600 FEG nn n n<br />
Sirion 400 nn n<br />
Strata 400 nn n n<br />
Strata 400 STEM nn n n<br />
Strata DB235 nn n n n n n<br />
Strata <strong>FIB</strong> 200 nn n n n n<br />
Strata <strong>FIB</strong> 201 nn n n n n<br />
V600CE nn n n n<br />
V600<strong>FIB</strong> nn n n n<br />
XL30 nn n n<br />
XL30 E<strong>SEM</strong> nn n n n<br />
XL40 nn n<br />
XL830 nn<br />
XL865 nn<br />
nn Recommended interfacing solution
» Fast setup and removal » Excellent stability » No restrictions on microscope functionality » System can be dependent or independent from microscope stage movements<br />
Roof mount<br />
Stage mount<br />
Universal mount<br />
FEI Nova Nanolab 600<br />
FEI XL30<br />
Zeiss 1530<br />
Zeiss<br />
Bridge Door Flange GIS-port Loadlock Roof Stage Universal<br />
1525 nn n n<br />
1530 nn n n<br />
1530VP nn n n<br />
1530XB Crossbeam nn n n<br />
1540EsB Crossbeam nn n n<br />
1540XB Crossbeam nn n n<br />
1550 nn n n<br />
1550VP nn n n<br />
1560 nn n<br />
1560XB Crossbeam nn n<br />
DSM 962 nn n<br />
DSM 982 nn<br />
Evo 40 nn<br />
Evo 50 nn<br />
Evo 50 Raman nn<br />
Evo 50 Raman WDS nn<br />
Evo 50 WDS nn<br />
Evo 60 nn<br />
Evo 60 WDS nn<br />
Neon 40 nn n n<br />
NVision 40 nn n n<br />
Supra 25 nn<br />
Supra 35 nn n<br />
Supra 35 VP nn n<br />
Supra 40 nn n<br />
Supra 40 WDS nn n<br />
Supra 40VP nn n<br />
Supra 55 nn n<br />
Supra 55VP nn n<br />
Supra 60 nn<br />
Supra 60VP nn<br />
Ultra 55 nn n<br />
Ultra 60 nn<br />
nn Recommended interfacing solution
Contact us at<br />
info@nanotechnik.com<br />
or find your local agent at<br />
www.nanotechnik.com<br />
<strong>Kleindiek</strong> <strong>Nanotechnik</strong> GmbH<br />
Aspenhaustr. 25<br />
72770 Reutlingen<br />
Germany<br />
Tel. +49 7121 345 395-0<br />
Fax. +49 7121 345 395-55<br />
info@nanotechnik.com<br />
www.nanotechnik.com<br />
All technical specifications are approximate.<br />
Due to continuous development, we reserve <strong>the</strong> right to change specifications without notice.<br />
Version 8.01. © <strong>Kleindiek</strong> <strong>Nanotechnik</strong> GmbH.
Prober Module<br />
<strong>MM3A</strong>-EM Mounting Solution <strong>for</strong> Hitachi S-4800 & SU-70<br />
Diameter: 150 mm<br />
Loadlock compatible: 6” loadlock<br />
Stage link: All axes<br />
Optional: 2-axis substage <strong>for</strong> sample movement<br />
Number of <strong>MM3A</strong>-EM’s: 4<br />
Default flange: 69 mm diameter Ø<br />
For more in<strong>for</strong>mation: info@nanotechnik.com<br />
All technical specifications are approximate. Due to continuous development, we reserve <strong>the</strong> right to change specifications without notice. Version 7.08. © <strong>Kleindiek</strong> <strong>Nanotechnik</strong> GmbH.
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