RAREFIED GAS DYNAMICS AND ITS APPLICATIONS TO VACUUM ...
RAREFIED GAS DYNAMICS AND ITS APPLICATIONS TO VACUUM ...
RAREFIED GAS DYNAMICS AND ITS APPLICATIONS TO VACUUM ...
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Holweck pump. Results<br />
Dimensional pumping speed<br />
0.3<br />
Gη<br />
0.2<br />
0.1<br />
0<br />
N2<br />
Ar<br />
0.1 1 10 100<br />
δh<br />
Felix Sharipov – p. 43