In-Situ Metrology for MBE
Overview of k-Space Associates Product Line for MBE
Overview of k-Space Associates Product Line for MBE
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<strong>MBE</strong> Product Line Overview<br />
kSA BandiT<br />
• Wafer Temperature Measurement<br />
kSA 400<br />
• Analytical RHEED<br />
kSA MOS<br />
• Wafer Curvature and Thin Film<br />
Stress<br />
kSA RateRat<br />
• Deposition Rate Monitoring<br />
Accessories<br />
• RHEED screens, triggering<br />
k-Space Associates, <strong>In</strong>c. Confidential
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