In-Situ Metrology for MBE

18.07.2013 • Views

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In-Situ Metrology for MBE

Overview of k-Space Associates Product Line for MBE

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kSA BandiT<br />

k-Space Associates, <strong>In</strong>c. Confidential

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k-Space Associates, <strong>In</strong>c. kSA BandiT “Leaders in Thin-Film Characterization” Substrate Temperature Monitoring

kSA BandiT k-Space Associates, <strong>In</strong>c. Confidential

Page 1 and 2: July 18, 2013
Page 3 and 4: kSA BandiT kSA MOS Optical Metrolog
Page 5 and 6: Hi Performance, Integrated CCD Came
Page 7: kSA 400 Software Features Up to 96
Page 11 and 12: kSA BandiT: Band Edge Thermometry A
Page 13 and 14: kSA BandiT: Growth Rate Determinati
Page 15 and 16: kSA BandiT: Surface Roughness Rough
Page 17 and 18: Motorized autoscanning detector •
Page 19 and 20: k-Space Associates, Inc. kSA MOS
Page 21 and 22: kSA MOS In-Situ Curvature/Stress B
Page 23 and 24: k-Space Associates, Inc. kSA RateRa
Page 25 and 26: Any multiple-layer thin film kSA Ra