In-Situ Metrology for MBE

18.07.2013 • Views

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In-Situ Metrology for MBE

Overview of k-Space Associates Product Line for MBE

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k-Space Associates, <strong>In</strong>c.<br />

kSA 400<br />

Analytical RHEED<br />

“Leaders in Thin-Film<br />

Characterization”<br />

Thursday, July 18, 2013

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k-Space Associates, <strong>In</strong>c. kSA 400 Analytical RHEED “Leaders in Thin-Film Characterization” Thursday, July 18, 2013

Hi Per<strong>for</strong>mance, <strong>In</strong>tegrated CCD Cameras kSA 400 System Hardware Multiple, Flange Mount Design Options k-Space Associates, <strong>In</strong>c. Confidential

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Page 7 and 8: kSA 400 Software Features Up to 96
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Page 13 and 14: kSA BandiT: Growth Rate Determinati
Page 15 and 16: kSA BandiT: Surface Roughness Rough
Page 17 and 18: Motorized autoscanning detector •
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Page 21 and 22: kSA MOS In-Situ Curvature/Stress B
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Page 25 and 26: Any multiple-layer thin film kSA Ra