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William Stratton Ph.D. Thesis - MINDS@UW Home

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C1<br />

C2 &<br />

Objective<br />

Aperture<br />

Virtual<br />

aperture<br />

C3<br />

Objective Lens<br />

Shift<br />

probe<br />

Sample<br />

0.5 1/Å<br />

STEM TEM<br />

Diffraction Pattern<br />

Tilt<br />

beam<br />

500 Å<br />

Real Real Image<br />

Image<br />

C1<br />

C2<br />

Sample<br />

Objective Lens<br />

Objective<br />

Aperture<br />

Projector Lens<br />

Figure 1.5: Schematic difference between STEM FEM and TEM FEM. STEM FEM with a<br />

STEM translates the probe to acquire multiple nanodiffraction patterns while TEM FEM with a<br />

TEM tilts the beam to obtain a real space image. TEM FEM with usually covers multiple more<br />

sample area in the V calculation compared to STEM FEM. Figure from 84 .<br />

18

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