Diffuse Scattering - Spallation Neutron Source - Oak Ridge National ...
Diffuse Scattering - Spallation Neutron Source - Oak Ridge National ...
Diffuse Scattering - Spallation Neutron Source - Oak Ridge National ...
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1-10<br />
MeV<br />
Si +<br />
Micro-diffuse scattering applied to High<br />
Energy, Self-Ion Implantation in Si<br />
Vacancy Interstitial<br />
X-ray Microbeam<br />
•cleave sample in cross-section<br />
silicon<br />
substrate<br />
cleaved edge<br />
•translate to probe depth dependence<br />
Yoon, Larson, Tischler, Haynes<br />
Spatial separation of recoils and<br />
vacancies due to momentum transfer<br />
recoiled<br />
vacancies<br />
atoms<br />
Vacancy | Interstitial<br />
Sample<br />
0 R p<br />
Order<br />
Sorting<br />
Aperture<br />
Fresnel<br />
Zone<br />
Plate<br />
R p<br />
Beam<br />
Stop
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