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Vacuum Fittings Feedthroughs - Granzow

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CF <strong>Feedthroughs</strong><br />

CF feedthroughs are available in a<br />

variety of field-proven designs,<br />

specifically:<br />

- Linear motion mechanical feedthroughs,<br />

- Rotary motion mechanical feedthroughs,<br />

A stainless steel bellows is used to<br />

seal off the CF linear and rotary feedthroughs<br />

against the atmosphere.<br />

All feedthroughs can be installed in the<br />

vacuum systems in any orientation.<br />

Abbreviations used in connection<br />

with feedthroughs:<br />

F<br />

Feedthrough<br />

E<br />

L<br />

N<br />

Electric<br />

Liquid<br />

Normal<br />

P<br />

Precision<br />

Linear Motion Mechanical<br />

<strong>Feedthroughs</strong><br />

F<br />

HC<br />

HV<br />

L<br />

R<br />

Frequency<br />

Current<br />

Voltage<br />

Linear<br />

Rotary<br />

ø10 0<br />

-0.1<br />

M6x10<br />

50<br />

15<br />

ø33<br />

105,5<br />

183<br />

77,5<br />

Dimensional drawing for the FNL 16/25 linear<br />

motion feedthrough<br />

Dimensional drawing for the FNL 40/50 linear<br />

motion feedthrough<br />

Technical Data FNL 16/25 FNL 40/50<br />

Nominal width<br />

DN<br />

Shaft connection<br />

mm<br />

Feedthrough/seal<br />

Actuator<br />

Travel<br />

mm<br />

Scale division<br />

mm<br />

Shaft load<br />

Radial at max. displacement<br />

N<br />

Axial, against vacuum<br />

N<br />

Axial, against vatmoshere<br />

N<br />

Torsion<br />

Nm (lbf-in)<br />

Tightness mbar x l x s -1<br />

Pressure absolute<br />

Bakeout temperatureFeedthrough °C<br />

Weight<br />

kg (lbs)<br />

Materials exposed to process media<br />

16 CF-R 40 CF-R<br />

M 4 x 16 M 6 x 10, ˇ 10<br />

bellow<br />

bellow<br />

manually<br />

manually<br />

25 50<br />

5 10<br />

20 200<br />

85 140<br />

100 200<br />

0.2 (1.77) 0.5 (4.43)<br />

1 x 10 -10 1 x 10 -10<br />

1 x 10 -9 mbar to 2 bar 1 x 10 -9 mbar to 2 bar<br />

300 300<br />

0.15 (0.33) 0.75 (1.66)<br />

Stainless steel<br />

Stainless steel<br />

Ordering information<br />

Linear motion feedthrough<br />

FNL 16/25 FNL 40/50<br />

Part No. 210 250 Part No. 210 251<br />

C13 62<br />

Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog

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